Inficon HAPSITE Smart - Page 487

15 - 29
IPN 074-397-P1G
HAPSITE Smart Operating Manual
Figure 15-25 New NEG Pump
5 On the new NEG Pump, wipe inside the flange with methanol. See Figure
15-26.
Figure 15-26 Cleaning Flange with Methanol
6 Save the rubber “O” ring assembly and container to dispose of the old NEG
Pump.
7 Place the new aluminum gasket on the new NEG Pump. See Figure 15-27.
HINT: Inspect the manifold face, ionizer and manifold inside for nicks, residue,
and scratches.
HINT: Write down the Serial Number of the New NEG Pump.
O-ring and seat-
ing ring assembly