1 Nozzle1/Head Replacement [0 to 99999999 / 0 / 1]
2 Nozzle2/Head Replacement
3 Nozzle3/Head Replacement
4 Nozzle4/Head Replacement
5 Nozzle5/Head Replacement
6 Nozzle6/Head Replacement
7 Nozzle7/Head Replacement
8 Nozzle8/Head Replacement
9 Nozzle9/Head Replacement
10 Nozzle10/Head Replacement
11 Nozzle1/Auto Nozzle Check Unit Replacement
12 Nozzle2/Auto Nozzle Check Unit Replacement
13 Nozzle3/Auto Nozzle Check Unit Replacement
14 Nozzle4/Auto Nozzle Check Unit Replacement
15 Nozzle5/Auto Nozzle Check Unit Replacement
16 Nozzle6/Auto Nozzle Check Unit Replacement
17 Nozzle7/Auto Nozzle Check Unit Replacement
18 Nozzle8/Auto Nozzle Check Unit Replacement
19 Nozzle9/Auto Nozzle Check Unit Replacement
20 Nozzle10/Auto Nozzle Check Unit Replacement
7770 No Filling Negative Pressure
1 Pressure/Humidity Fluctuation Count H1
[0 to 999999/0/1]
2 Pressure/Humidity Fluctuation Count H2
[0 to 999999/0/1]
3. SP Mode Tables
174