7. SPECIAL ADJUSTMENT FUNCTIONS
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7.4 Compliance with SEMI-F47 standard
The control circuit power supply of the the driver can comply with SEMI-F47
standard. However, a back-up capacitor may be necessary for instantaneous
power failure in the main circuit power supply depending on the power supply
impedance and operating situation.
Use a 3-phase for the input power supply of the driver. Using a 1-phase 100 V
AC/200 V AC for the input power supply will not comply with SEMI-F47 standard.
Be sure to perform actual machine tests and detail checks for power supply
instantaneous power failure of SEMI-F47 standard with your equipment.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage
sag immunity test".
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in
the capacitor in case that an instantaneous power failure occurs during operation.
(1) Parameter setting
Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47.
Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power]
occurrence.
Enabling SEMI-F47 will change operation as follows.
(a) The voltage will drop in the control circuit power at "Rated voltage × 50% or less". After 200 ms, [AL.
10.1 Voltage drop in the control circuit power] will occur.
(b) [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Table 7.1 Voltages which trigger [AL. 10.2 Voltage drop in the main circuit power]
Bus voltage which triggers alarm
(c) MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control
circuit power] occurs.
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