19.EtherNet/IP COMMUNICATION
(49) Alarm Monitor 35 Motor-side/load-side position deviation (2BA3h)
Alarm Monitor 35 Motor-side/load-side position deviation
The motor-side/load-side position deviation at alarm occurrence is returned.
(50) Alarm Monitor 36 Motor-side/load-side speed deviation (2BA4h)
Alarm Monitor 36 Motor-side/load-side speed deviation
The servo motor-side/load-side speed deviation at alarm occurrence is returned.
(51) Alarm Monitor 37 Internal temperature of encoder (2BA5h)
Alarm Monitor 37 Internal temperature of encoder
The internal temperature of encoder at alarm occurrence is returned.
(52) Alarm Monitor 38 Settling time (2BA6h)
Alarm Monitor 38 Settling time
The settling time at alarm occurrence is returned.
(53) Alarm Monitor 39 Oscillation detection frequency (2BA7h)
Alarm Monitor 39 Oscillation detection frequency
The oscillation detection frequency at alarm occurrence is returned.