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6.1 Different adjustment methods ............................................................................................................. 6-2

6.1.1 Adjustment on a single driver ......................................................................................................... 6-2

6.1.2 Adjustment using setup software (MR Configurator2TM) .............................................................. 6-3

6.2 One-touch tuning ................................................................................................................................. 6-4

6.2.1 One-touch tuning flowchart ............................................................................................................ 6-5

6.2.2 Display transition and operation procedure of one-touch tuning .................................................... 6-6

6.2.3 Caution for one-touch tuning ........................................................................................................ 6-11

6.3 Auto tuning ........................................................................................................................................ 6-12

6.3.1 Auto tuning mode ......................................................................................................................... 6-12

6.3.2 Auto tuning mode basis ................................................................................................................ 6-13

6.3.3 Adjustment procedure by auto tuning ........................................................................................... 6-14

6.3.4 Response level setting in auto tuning mode ................................................................................. 6-15

6.4 Manual mode .................................................................................................................................... 6-16

6.5 2gain adjustment mode ..................................................................................................................... 6-20

7. SPECIAL ADJUSTMENT FUNCTIONS 7- 1 to 7-36

7.1 Filter setting ......................................................................................................................................... 7-2

7.1.1 Machine resonance suppression filter ............................................................................................ 7-2

7.1.2 Adaptive filter II ............................................................................................................................... 7-5

7.1.3 Shaft resonance suppression filter ................................................................................................. 7-7

7.1.4 Low-pass filter ................................................................................................................................ 7-8

7.1.5 Advanced vibration suppression control II ...................................................................................... 7-8

7.1.6 Command notch filter ................................................................................................................... 7-13

7.2 Gain switching function ..................................................................................................................... 7-14

7.2.1 Applications .................................................................................................................................. 7-14

7.2.2 Function block diagram ................................................................................................................ 7-15

7.2.3 Parameter ..................................................................................................................................... 7-16

7.2.4 Gain switching procedure ............................................................................................................. 7-19

7.3 Tough drive function .......................................................................................................................... 7-23

7.3.1 Vibration tough drive function ....................................................................................................... 7-23

7.3.2 Instantaneous power failure tough drive function ......................................................................... 7-25

7.4 Compliance with SEMI-F47 standard ................................................................................................ 7-29

7.5 Model adaptive control disabled ........................................................................................................ 7-31

7.6 Lost motion compensation function .................................................................................................. 7-32

7.7 Super trace control ............................................................................................................................ 7-35

8. TROUBLESHOOTING 8- 1 to 8- 66

8.1 Explanations of the lists ...................................................................................................................... 8-2

8.2 Alarm list ............................................................................................................................................. 8-3

8.3 Warning list ....................................................................................................................................... 8-11

8.4 Remedies for alarms ......................................................................................................................... 8-14

8.5 Remedies for warnings ..................................................................................................................... 8-54

8.6 Troubleshooting at power on ............................................................................................................. 8-65

8.7 Trouble which does not trigger an alarm/warning ............................................................................. 8-66

9. OUTLINE DRAWINGS 9- 1 to 9-5

9.1 Driver ................................................................................................................................................... 9-2

9.2 Connector ............................................................................................................................................ 9-5