18.EtherCAT COMMUNICATION
(21) Motor-side/load-side position deviation (2B23h)
Motor-side/load-side position deviation
The servo motor-side/load-side position deviation is returned.
(22) Motor-side/load-side speed deviation (2B24h)
Motor-side/load-side speed deviation
The servo motor-side/load-side speed deviation is returned.
(23) Internal temperature of encoder (2B25h)
Internal temperature of encoder
The internal temperature of encoder is returned.
(24) Settling time (2B26h)
The settling time is returned.
(25) Oscillation detection frequency (2B27h)
Oscillation detection frequency
The oscillation detection frequency is returned.