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Keithley 4200A-SCS - Capacitance Measurement Tests

Keithley 4200A-SCS
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Appendix
C: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Parameter Analyzer Refer
ence Manual
C-2 4200A-901-01 Rev. C / February 2017
The following figure shows the three regions of a typical C-V curve for a MOS capacitor.
Figure 570: Typical C-V curve for a MOS capacitor
Capacitance measurement tests
The 4200A-SCS provides the following user modules to perform C-V tests using the Keysight Models
4284A and 4980A:
CvSweep4284. C-V sweep test: Performs a capacitance and conductance measurement at each
step of a user-configured linear voltage sweep.
Cmeas4284. C measurement: Performs a capacitance and conductance measurement at a fixed
bias voltage.
Details on the user modules for the Keysight Models 4284A and 4980A are provided in the
HP4284ulib User Library Reference (on page 6-309
).
If needed, you can initially do an OPEN and SHORT correction on the 4284A or 4980A to achieve
the most accurate C-V measurements. See the Keysight 4284A or 4980A Operation Manual for
details.

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