-SCS Parameter Analyzer Reference Manual Appendix F:
4200A-901-01 Rev. C / February 2017 F-3
Supported probers
Supported probe station Additional information
Cascade Microtech Model PA200
Cascade Microtech PA200 Prober (on
page G-1)
Micromanipulator Model 8860
Micromanipulator 8860 Prober (on
page H-1)
Using a Manual or Fake Prober (on
page I-1)
Cascade Summit-12000 Prober (on
page J-1)
Signatone CM500
Signatone CM500 Prober (on page
K-
Contact Keithley Instruments for the most up-to-date list of supported probe stations.
Use KCon (on page 7-1) to add the prober to the instrument list. See the information for the specific
prober for details.
PRBGEN user modules
Prober-control software provided by supported prober vendors gives access to the full feature set of
each prober. You use the prober-control software to define a list of wafer locations to be probed. The
4200A-SCS relies on the prober controller and associated software to maintain this probe list. The
PRBGEN user modules communicate with the prober controller, normally through the GPIB bus or
COM1 (serial bus) port, to instruct it to step through the probe list. This technique of prober control is
referred to as learn mode because the prober-control software is taught the physical location of each
probe location. The following table summarizes the user modules included in the PRBGEN prober
control user library.
User module Description
Initializes the prober driver and establishes the reference site or die.
Instructs the prober to move the probe station into contact or to break
contact between the wafer and the test system pins (probe needles).
Instructs the prober to move to the next subsite or test element group in
the probe list.
Instructs the prober to move to the next site or die in the probe list.