Keithley 4200A-SCS

Model 420
0A-SCS Parameter Analyzer Reference Manual Section 6:
Clarius
4200A-901-01 Rev. C / February 2017 6-319
PRBGEN user library
The PRBGEN user library provides test modules to initialize the prober, move to the next site or subsite
in the wafer map of the prober, make or break contact between the probes and the wafer, and get the
X position and Y position of the prober. It allows Clarius to control all supported probers in the same
manner. Clarius projects that use PRBGEN work with any prober supported by Keithley Instruments.
The user modules in the PRBGEN user library are provided as actions in Clarius.
PRBGEN user modules
User module Clarius action Description
PrChuck (on
page F-12)
prober-contact
Directs the prober to have the probe pins make contact with the
wafer or separate the pins from the wafer.
PrInit (on page
F-11)
prober-init
Initializes the prober with die size, first coordinate (X and Y),
units (mm or mils), and mode information.
PrMovNxt (on
page F-14)
prober-move
In learn mode, the PrMovNxt command causes the prober to
move to the next site after inking.
PrSSMovNxt
(on page F-13)
prober-ss-move
In learn mode, the PrSSMovNxt command causes the prober to
move to the next subsite after inking.
QSCVulib user library
The QSCVulib user library provides a user module to do quasistatic C-V sweeps.
QSCVulib module
User module Clarius test Description
meas_qscv
ramprate-
cvsweep
This test uses two SMUs with preamplifiers to do a quasistatic C-V
sweep. The 4200-PA Preamplifiers are required because this test
involves sourcing and measuring current in the picoamp range. The
SMUs source current to charge the capacitor and measure the
voltage, time, and discharge current.
RPM_ILimit_Control user library
The RPM_ILimit_Control user library provides a user module for short-term calibration of the
4225-RPM current clamp. It also provides user modules that support the calibration user module, but
which should not be set individually.
RPM_ILimit_Control user modules
User module Description
Do_RPM_ILimit_Cal
Performs a short-term calibration of the I-clamp of properly-
equipped 4225-RPMs.
Get_RPM_ILimit_DAC_Value
Do not set individually. This is used by
Set_RPM_ICompliance
.
isLimitSupported
Do not set individually. Used by Do_RPM_ILimit_Cal,
Get_RPM_ILimit_DAC_Value, Set_RPM_ICompliance, and
OpenLimit.
OpenLimit
Do not set individually.
Set_RPM_ICompliance
Do not set individually.