Keithley 4200A-SCS - Test Flow

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix F:
Set up a probe station
4200A-901-01 Rev. C / February 2017 F-17
Test flow
When you run the probesubsites project, the following occurs:
1. The action prober-init initializes the prober driver.
2. The test moves to subsite1, 4terminal-n-fet.
3. The action prober-contact moves the chuck to the wafer.
4. The action connect connects the SMUs to the probes for the n-channel MOSFET as shown in
the following figure.
Figure 631: Connect SMUs to N-channel MOSFET
5. The test runs vds-id-1x, which generates a family of curves (I
D
vs. V
D
) for the MOSFET.
6. The test moves to 3terminal-npn-bjt.