Keithley 4200A-SCS - Generate Short Connection Compensation Data

Model 4200A
-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
voltage unit
4200A-901-01 Rev. C / February 2017 4-13
Generate short connection compensation data
Short connection compensation is usually done to offset correction for large capacitances.
Short compensation is done by connecting all the CVU terminals directly together. A known short is
connected to the CVU terminals through all the cables, adaptors, and probes that may be in the test
circuit. You can make a short at the wafer level by shorting all probes together.
To generate short connection compensation data:
1. Make the connections to the 4210-CVU, as shown in the following figure. For remote (4-wire)
sensing, the shields of the four SMA cables must be connected.
Figure 89: Connections for short and load connection compensation
2. In Clarius, select Tools. The Clarius Tools dialog box opens.
Figure 90: Clarius Tools dialog box