Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix F:
Set up a probe station
4200A-901-01 Rev. C / February 2017 F-7
Understanding site coordinate information
The next topics describe the reference site, probe sites, and chuck movement.
Reference site (die)
The designated reference site is defined in the prober-init action by selecting Configure and
entering the parameters. This is the first stopping point of the prober once aligned. The physical
location of the reference site may be any coordinate that is selected on the wafer and is selected for
probing or marked for probing through the prober software. The coordinate system of the wafer is
also defined through the prober software. For example, the coordinates of the reference site shown in
the following figure are (3, 1).
For parameter descriptions, refer to the Help pane.
The defined reference site must match the physical location of the wafer. This is the location on the
wafer directly below the probe pins after the wafer has been loaded.
Figure 625: Sample reference site location