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Keithley 4200A-SCS Reference Manual
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Model 4200A
-
SCS
Paramete
r Analyzer
R
eference Man
ual
Section
6
:
Clarius
4200A
-
901
-
01 Rev
. C / Februar
y
2017
6-
223
O
pen the Formula
tor
To open the
Formulator:
1.
In the project tree,
select a test.
2.
Select
Configure
.
3.
In the Test Sett
ings pane, select
Formul
ator
. The
Formulator dialog
box opens, as shown bel
ow.
Figure
377
: Formulator with no entries
491
493
Table of Contents
Default Chapter
4
Safety Precautions
4
Table of Contents
6
Introduction
26
4200A-SCS System Overview
27
Source-Measure Unit (SMU)
28
Preamplifier
28
Pulse Source-Measure Hardware
28
Ground Unit (GNDU)
28
Capacitance-Voltage (CVU) Hardware
28
Software Features
29
Embedded Computer Policy
29
Connections and Configuration
30
Introduction
30
Basic Source-Measure Connections
30
Maximum Signal Limits
30
Shielding and Guarding
31
Signal Integrity
33
SMU Connections
33
Preamplifier Connections
36
Using the Ground Unit
37
SMU Circuit COMMON Connections
41
4200-SMU and 4210-SMU Overview
42
Test Equipment Connections
46
Recommended Connecting Cables
47
Test Fixture and Device under Test (DUT) Connections
47
Prober Connections
49
Configuring Safety Interlock Operation
49
Control and Data Connections
51
GPIB Connections
51
Pulse Cards
52
Standard Pulse
53
Configuring the System
54
Source-Measure Hardware
56
Source-Measure Units
56
4200-SMU and 4210-SMU Overview
56
Source-Measure Hardware Overview
57
Basic SMU Circuit Configuration
57
Compliance Limits
58
Source or Sink
59
I-Source Operating Boundaries
61
I-Source Operation Examples
62
V-Source Operating Boundaries
63
V-Source Operation Examples
63
Source I Measure I and Source V Measure V
65
SMU Terminals and Connectors
65
Source-Measure Unit (SMU) with 4200-PA Overview
66
Basic Smu/Preamplifier Circuit Configuration
67
Compliance Limit for a SMU with a 4200-PA
67
Using Minimum Compliance
67
Operating Boundaries
68
Preamplifier Terminals and Connectors
69
FORCE Terminal
69
SENSE Terminal
70
Preamplifier CONTROL Connector
70
Preamplifier Mounting
71
SMU Circuit COMMON Connections
73
Ground Unit (GNDU) Overview
74
Basic Characteristics
74
Ground Unit Connections
75
Ground Unit DUT Connections
75
Ground Unit Terminals and Connectors
76
FORCE Terminal
76
SENSE Terminal
76
COMMON Terminal
77
Chassis Ground
77
Source-Measure Concepts
78
Guarding
78
Local and Remote Sensing
82
Sink Overview
85
Source-Measure Considerations
86
Sweep Concepts
89
Operation Mode Timing Diagrams
91
Multi-Frequency Capacitance-Voltage Unit
94
Introduction
94
Measurement Overview
94
Measurement Functions
95
Test Signal
96
DC Bias Function and Sweep Characteristics
96
Force-Measure Timing
97
4210-CVU Connections
98
Connection Notes
98
Typical 4210-CVU Test Connections to a DUT
99
Test Connections to a Probe Card
100
Typical CVU Matrix Card Connections
100
Connection Compensation
103
Generate Open Connection Compensation Data
104
Generate Short Connection Compensation Data
106
Generate Load Connection Compensation Data
108
Compensation Data
109
Enable Compensation
110
ABB Unbalance Errors
111
CVU Real-Time Measure Mode
111
Confidence Check
112
Run an Open Check and Short Check
113
4210-CVU Project Example
114
Select a Project
114
Configure the Test
116
Run the Test and Review Results
117
Timing Diagrams
118
CVU Using Voltage Bias
118
CVU Using Voltage Sweep
119
CVU Using Voltage List Sweep
120
CVU Using Frequency Sweep - DC Bias
122
CVU Frequency Sweep - DC Step
123
CVU Terminal Settings Advanced Settings and Circuits
124
C-V Projects
126
Capacitor I-V and C-V Measurements with Series 700 Project (Cap-IV-CV-Matrix)
127
BJT Capacitance Tests (Cvu-Bjt)
131
BJT I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (Cvu-Bjt-CVIV)
135
High-Voltage C-V Tests Project (Cvu-Highv)
136
MOS Capacitor C-V Project (Cvu-Moscap)
137
MOS Capacitor Lifetime Test Project (Moscap-Lifetime)
157
MOSFET I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (Mosfet-CVIV)
163
Capacitor Measurements (Cap-Measurements)
163
Interconnect Capacitance C-V Sweep Test (CV-Sweep)
165
MOS Capacitor Mobile Ion Project (Moscap-Mobile-Ion)
166
MOSFET Project (Mosfet)
173
Nanowire Tests
179
Diode Project (Diode-Project)
181
Solar Cell Project (Solarcell)
186
Demo Project (Default)
193
Carbon Nanotube Transistor Characterization Project (Cntfet-Characterization)
193
Pulse Measure and Pulse Generator Units
194
PGU and PMU Connectors
195
PMU Block Diagram
196
Pulse Modes
196
Pulse Measurement Types (PMU)
197
Measure Modes
197
Sample Rate
198
Model 4225-RPM
199
RPM Input, Output, and Top Panels
199
Using the RPM as a Switch
201
Waveform Capture
202
Connections
202
PMU Common Connections
203
Shield Connections
204
Cable Length
204
High Frequency Connections
204
Prober Chuck Connections
205
Two-Terminal Device Connections
205
Three-Terminal Device Connections
207
Four-Terminal Device Connections
208
Connections to Prober or Test Fixture Bulkhead Connectors
209
Using an SMA to SSMC Adapter Cable to Connect Pulse Card to DUT
209
4225-RPM Connections
210
Configure the PGU, PMU, and RPM Using Tests
213
PMU Pulse Timing Preview
213
PMU Amplitude Sweep Example (One-Channel)
215
PMU Amplitude Sweep and Step Example (Two-Channel)
217
Higher Channel Count Test Example
220
PMU Connection Compensation
223
Perform Connection Compensation
225
Enabling Connection Compensation
226
Load-Line Effect Compensation (LLEC) for the PMU
227
Methods to Compensate for Load-Line Effect
227
How LLEC Adjusts Pulse Output to the Target Levels
228
Coping with the Load-Line Effect
229
LLEC Maintains Even Voltage Spacing
230
Test Considerations
231
LPT Functions Used to Configure LLEC
231
Enable LLEC
232
Disable LLEC and Set the Output Impedance
233
Pulse Parameter Definitions
233
PMU Minimum Settling Times Versus Current Measure Range
234
PMU Capacitive Charging/Discharging Effects
235
PMU and RPM Measure Ranges Are Not Source Ranges
237
4220-PGU and 4225-PMU Output Limitations
238
4200A-SCS Power Supply Limitations
239
Basic Troubleshooting Procedure
241
Step 1. Verify Prober Connections from the PMU or RPM to the DUT
241
Step 2. Verify the Pulse Shape
242
Step 3. Is the Pulse Level Correct for each Channel
243
Step 4. Is the Pulse I-V Curve Suspect
243
Pulse Source-Measure Concepts
248
Ultra-Fast I-V Tests
248
Segment Arb Waveform
249
Full Arb Waveform
252
Pulse Waveforms for Nonvolatile Memory Testing
253
DUT Resistance Determines Pulse Voltage Across DUT
254
Triggering
259
Pulse Source-Measure Connections
262
Measurement Types
263
Spot Mean Measurements
263
Spot Mean Discrete Readings
263
Spot Mean Average Readings
264
Waveform Measurements
265
Waveform Discrete Readings
266
Waveform Average Readings
266
Measurement Timing
267
Clarius
270
Get Started with Clarius
270
Clarius Interface
271
Additional Clarius Applications
278
Set up a Simple Project
278
Select Project Components
279
Add a Device and Test to the Project
280
Rearrange Items in the Project Tree
281
Delete Objects in the Project Tree
281
Configure a Simple Test
282
Set the Key Parameters
283
Run a Simple Test
284
Working with My Projects
285
Open a Project
285
Create a New Project from My Projects
286
Export a Project
286
Import a Project
286
Migrate Projects from 4200-SCS Systems
288
Duplicate a Project
288
Delete a Project
289
Edit Project Information
289
View My Projects
290
Test and Terminal Setting Descriptions
291
Operation Mode (SMU)
291
SMU - All Terminal Parameters
305
Operation Mode (CVU)
316
CVU - All Terminal Parameters
324
Operation Mode (PMU)
332
PMU - All Terminal Parameters
339
Test Settings
349
Set up a Complex Project
374
Customize Tests
375
Link Tests or Actions
409
Add Actions
410
Sites
411
Subsites
411
Configure a Complex Test
412
Test and Terminal Settings
412
Step or Sweep Multiple Device Terminals in the same Test
413
Configure Actions
415
Configure Sites
416
Configure Subsite Cycling
417
Run a Complex Test
445
Run Projects, Subsites, Devices, and Tests
445
Cycle a Subsite
450
Multi-Site Execution
451
Analyze Data
452
Spreadsheet
453
Save Test Results and Graphs
463
Graph
465
The Formulator
491
Configure Formulator Calculations
491
Open the Formulator
492
Becoming Familiar with the Formulator Dialog Box
493
Using the Formulator Options
495
Real-Time Functions, Operators, and Formulas
496
Post-Test-Only Functions and Formulas
496
Formulator Function Reference
497
ABS Formulator Function
497
SQRT Formulator Function
497
EXP Formulator Function
498
LOG Formulator Function
498
LN Formulator Function
499
DELTA Formulator Function
499
COND Formulator Function
500
Statistics
500
AVG Formulator Function
500
MAVG Formulator Function
501
MAX Formulator Function
501
MEDIAN Formulator Function
502
MIN Formulator Function
502
STDEV Formulator Function
502
Trigonometry
503
ACOS Formulator Function
503
ASIN Formulator Function
503
ATAN Formulator Function
504
COS Formulator Function
504
DEG Formulator Function
505
RAD Formulator Function
505
SIN Formulator Function
506
TAN Formulator Function
506
Array
507
AT Formulator Function
507
DIFF Formulator Function
507
FINDD Formulator Function
508
FINDLIN Formulator Function
509
FINDU Formulator Function
510
FIRSTPOS Formulator Function
510
INDEX Formulator Function
511
INTEG Formulator Function
512
LASTPOS Formulator Function
513
MAXPOS Formulator Function
514
MINPOS Formulator Function
514
SUBARRAY Formulator Function
514
SUMMV Formulator Function
515
Line Fits
516
EXPFIT Formulator Function
516
EXPFITA Formulator Function
517
EXPFITB Formulator Function
518
LINFIT Formulator Function
519
LINFITSLP Formulator Function
520
LINFITXINT Formulator Function
521
LINFITYINT Formulator Function
522
LOGFIT Formulator Function
523
LOGFITA Formulator Function
524
LOGFITB Formulator Function
525
POLY2COEFF Formulator Function
526
POLY2FIT Formulator Function
527
POLYNFIT Formulator Function
528
REGFIT Formulator Function
529
REGFITSLP Formulator Function
530
REGFITXINT Formulator Function
531
REGFITYINT Formulator Function
532
TANFIT Formulator Function
533
TANFITSLP Formulator Function
534
TANFITXINT Formulator Function
535
TANFITYINT Formulator Function
536
Identify Data Analysis Requirements
537
Calc Worksheet Function Definitions
541
ABS Calc Worksheet Function
542
ACOS Calc Worksheet Function
542
ACOSH Calc Worksheet Function
543
ASIN Calc Worksheet Function
543
ASINH Calc Worksheet Function
544
ATAN Calc Worksheet Function
544
ATAN2 Calc Worksheet Function
545
ATANH Calc Worksheet Function
545
AVERAGE Calc Worksheet Function
546
COS Calc Worksheet Function
546
COSH Calc Worksheet Function
547
DAY Calc Worksheet Function
547
EXP Calc Worksheet Function
548
FIXED Calc Worksheet Function
548
HOUR Calc Worksheet Function
549
IF Calc Worksheet Function
549
LN Calc Worksheet Function
550
LOG Calc Worksheet Function
550
LOG10 Calc Worksheet Function
551
LOOKUP Calc Worksheet Function
552
MATCH Calc Worksheet Function
553
MAX Calc Worksheet Function
554
MIN Calc Worksheet Function
555
MINUTE Calc Worksheet Function
556
MONTH Calc Worksheet Function
557
NOW Calc Worksheet Function
558
PI Calc Worksheet Function
558
PRODUCT Calc Worksheet Function
559
ROUND Calc Worksheet Function
559
SECOND Calc Worksheet Function
560
SIGN Calc Worksheet Function
560
SIN Calc Worksheet Function
561
SINH Calc Worksheet Function
561
SQRT Calc Worksheet Function
562
STDEVP Calc Worksheet Function
562
SUM Calc Worksheet Function
563
SUMSQ Calc Worksheet Function
563
TAN Calc Worksheet Function
564
TANH Calc Worksheet Function
564
VARP Calc Worksheet Function
565
YEAR Calc Worksheet Function
565
Tools
566
Customize Clarius
566
Add Objects to the Library
566
My Settings
570
Project Tree Display Options
573
Messages Display Option
573
User Library Descriptions
574
Avmcontrol User Library
574
Beeplib User Library
574
Chargepumping User Library
575
Cvivulib User Library
575
Cvucompulib User Library
576
DLCP User Library
576
Flashulib User Library
577
Hivcvulib User Library
578
Hotchuck_Temptronics3010B User Library
578
Hotchuck_Triotek User Library
578
Hp4284Ulib User Library
578
Hp4294Ulib User Library
579
Hp8110Ulib User Library
580
Ki340Xulib User Library
580
Ki42Xxulib User Library
580
Ki590Ulib User Library
581
Ki595Ulib User Library
581
Ki82Ulib User Library
582
Ls336Ulib User Library
582
Matrixulib User Library
583
Nvm User Library
583
Ovpcontrol User Library
584
Parlib User Library
585
Pmu_Examples_Ulib User Library
585
Pmuulib User Library
587
Pmu_Pcram_Ulib User Library
587
PRBGEN User Library
588
Qscvulib User Library
588
Rpm_Ilimit_Control User Library
588
Utilities_Ulib
589
Wlrlib User Library
590
Winulib User Library
590
Abortretryignoredialog User Module
591
Inputokcanceldialog User Module
592
Okcanceldialog User Module
594
Okdialog User Module
595
Retrycanceldialog User Module
597
Yesnocanceldialog User Module
598
Yesnodialog User Module
600
Demo Project Overview
601
4-Terminal N-MOSFET Tests
603
3-Terminal NPN BJT Tests
603
Resistor Tests
604
Diode Tests
604
Capacitor Tests
604
Testing Flash Memory
605
Flash Connection Guidelines
606
Programming and Erasing Flash Memory
606
Endurance Testing
613
Disturb Testing
616
Using a Switch Matrix
618
Use Kpulse to Create and Export Segment Arb Waveforms
619
Enter Segment Arb Values into UTM Array Parameters
619
Direct Connections to Single DUT
620
Direct Connections to Array DUT for Disturb Testing
622
Embedded Computer Policy
623
Keithley Configuration Utility (Kcon)
624
Kcon Main Window
625
Configuration Navigator
626
Add an External Instrument
627
Supported External Equipment
629
Add a Driver for Unsupported Equipment
630
Use Kcon to Add Equipment to the 4200A-SCS
630
Remove an External Instrument
632
Validate Configuration
632
Update Preamplifier, RPM, and CVIV Configurations
633
Update the Preamplifier Configuration
633
Update the RPM Configuration
633
Update the 4200A-CVIV Configuration
634
Save
634
System Configuration Summary
634
System Configuration Properties
635
KI 4200A SCS Properties
635
Instrument Properties and Connections
637
KXCI Settings
639
Set up KXCI for GPIB Control
640
Set up KXCI for Ethernet Control
641
Setting up KXCI as a 4145B Emulator
641
Command Set
642
Tools
643
Formulator Constants
643
Generate Technical Support Files
644
About Kcon
644
Kcon Learning Center
645
Keithley User Library Tool (KULT)
646
Introduction
646
KULT Window
647
Understanding the Module Identification Area
647
Understanding the Module Parameter Display Area
648
Understanding the Module Code-Entry Area
648
Understanding the Terminating Brace Area
648
Understanding the Tab Area
648
Understanding the Status Bar
653
Understanding the Menus
654
Develop and Use User Libraries
658
Copy User Libraries and Modules from a 4200-SCS
658
Enabling Real-Time Plotting for Utms
659
KULT Tutorials
660
Tutorial 1: Creating a New User Library and User Module
661
Tutorial 2: Creating a User Module that Returns Data Arrays
673
Tutorial 3: Calling One User Module from Within Another
679
Tutorial 4: Customizing a User Test Module (UTM)
685
Advanced KULT Features
694
Managing User Libraries
694
Working with Interdependent User Modules and User Libraries
699
Understanding User-Module Locking
703
Debugging User Modules Using Microsoft Visual C
704
Format User Module Help to Display in the Clarius Help Pane
707
Creating Project Prompts
708
Using Dialog Boxes
708
Dialog Box Test Examples
710
Keithley External Control Interface (KXCI)
712
Introduction
712
KXCI Communications Connections
713
GPIB Connections
713
Ethernet Connections
714
Using Kcon to Configure KXCI
714
Setting the Remote Control Mode (GPIB or Ethernet)
715
Starting KXCI and the GPIB Command Interpreter
716
GPIB Status Indicators (GPIB Communications Only)
717
Graph Display
717
Using KXCI
717
Logging Commands, Errors, and Test Results
717
Logging Commands
718
Logging Errors
718
Logging Test Results
719
Understanding the Log File
719
Graphing the Test Results
720
GPIB Command Set
721
Page Commands
721
System Mode Commands
721
User Mode Commands
723
Commands Common to System and User Modes
723
4200A Command Set Only
723
GPIB Command Reference
724
System Mode Commands
724
User Mode Commands (US)
750
Commands Common to System and User Modes
754
4200A Command Set Only Commands
760
Ethernet Command Reference
760
SMU Default Settings
761
System Mode SMU Default Settings
762
Output Data Formats
763
Data Format for System Mode Readings
763
Data Format for User Mode Readings
764
Status Byte and Serial Polling
765
Status Byte
765
Bit B0, Data Ready
765
Bit B1, Syntax Error
766
Bit B4, Busy
766
Bit B6, RQS (Request for Service)
766
Serial Polling
766
Waiting for SRQ
767
Sample Programs
767
Program 1: VAR1 and VAR2 Sweep (System Mode)
767
Program 2: Basic Source-Measure (User Mode)
768
Program 3: Retrieving Saved Data (System Mode)
769
GPIB Error Messages
769
KXCI Pulse Generator Commands
770
KXCI CVU Commands
777
User Mode
777
System Mode
777
Modeless Commands
783
Code Examples
789
Calling KULT User Libraries Remotely
792
Systemutil User Library
796
KXCI Ethernet Client Driver
798
Driver Functions
799
Starting Kpulse
800
Kpulse Setup and Help
801
Kpulse (for Keithley Pulse Cards)
800
Triggering
802
Standard Pulse Waveforms
803
Segment Arb Waveforms
805
Exporting Segment Arb Waveform Files
807
Custom File Arb Waveforms (Full Arb)
808
Custom Arb File Operation: Select and Configure Waveforms
809
Custom Arb File Operation: Copy Waveforms into Sequencer
810
Custom Arb File Operation: Load Waveform and Turn on Output
811
Waveform Types
812
System Administration
820
Default User Accounts
821
Create New User Accounts
821
System Directories and Files
822
Manage Projects for Multiple Users
822
Enable Scroll Bars in Acrobat Reader
823
System-Level Backup and Restore Software
823
Restore the Drive Image to Factory Condition
824
Choose the Files to be Backed up
824
Protect User Files and System Software
825
Protect Software Integrity
825
Read and Write Permission Access to USB Ports
826
Add Clarius Applications to the Windows Startup Menu
827
Maintenance
828
Introduction
828
Front-Panel Display
829
Cleaning the Front-Panel Display
829
Adjusting the Display
829
Air Intake Ventilation Screens
829
Solid-State Hard Drive Maintenance
830
Repacking for Shipment
830
Updates to the Operating System Software
830
Firmware Upgrade
831
Accessing the Release Notes
831
Reset the Hardware
831
Lithium Battery
831
Calibrate the System
832
Fan Operation
834
Making Stable Measurements with Smus
835
Single SMU Stability Considerations
835
Multiple SMU Stability Considerations
836
Eliminating Oscillations
837
Low-Current Measurements
838
Leakage Currents
838
Generated Currents
839
Voltage Burden
841
Noise and Source Impedance
842
Cable Capacitance
843
Test System Performance
843
Interference
844
Electrostatic Interference
844
Radio Frequency Interference
844
Ground Loops and Other SMU Grounding Considerations
845
LPT Library Function Reference
846
Lists of LPT Library Commands
847
General Operation Commands
847
Math Operation Commands
849
SMU Commands
849
PGU (Pulse Only) and PMU (Pulse and Measure) Commands
850
Pulse Source Only (PG2) Commands
851
CVU Commands
852
Switch Commands
853
LPT Commands for General Operations
854
Clrscn
854
Clrtrg
856
Delay
857
Devint
858
Disable
860
Enable
861
Execut
861
Getinstattr
862
Getinstid
863
Getinstname
863
Getlpterr
864
Imeast
864
Inshld
864
Kibcmd
865
Kibdefclr
867
Kibdefdelete
868
Kibdefint
869
Kibrcv
870
Kibsnd
871
Kibspl
872
Kibsplw
873
Kspcfg
873
Kspdefclr
874
Kspdefdelete
875
Kspdefint
876
Ksprcv
877
Kspsnd
877
Postdatadouble
878
Postdataint
879
Postdatastring
880
Rdelay
880
Rtfary
881
Savgx
881
Scnmeas
883
Searchx
883
Setmode
887
Sintgx
889
Smeasx
890
Trigcomp
892
Trigxg, Trigxl
892
Tstdsl
895
Tstsel
895
LPT Commands for Math Operations
896
Kfpabs
896
Kfpadd
896
Kfpdiv
897
Kfpexp
898
Kfplog
898
Kfpmul
899
Kfpneg
900
Kfppwr
901
Kfpsqrt
902
Kfpsub
903
Adelay
904
Asweepx
904
LPT Commands for Smus
904
Avgx
907
Bmeasx
908
Bsweepx
910
Devclr
912
Devint
912
Forcex
914
Getstatus
915
Intgx
918
Limitx
920
Lorangex
921
Measx
923
Mpulse
925
Pulsex
926
Rangex
928
Rtfary
929
Setauto
930
Ssmeasx
931
Sweepx
933
LPT Commands for Pgus and Pmus
936
Dev_Abort
937
Postdatadoublebuffer
939
Pulse_Chan_Status
941
Pulse_Conncomp
942
Pulse_Exec
943
Pulse_Exec_Status
944
Pulse_Fetch
946
Pulse_Meas_Sm
951
Pulse_Meas_Timing
951
Pulse_Meas_Wfm
951
Pulse_Measrt
957
Pulse_Ranges
958
Pulse_Remove
960
Pulse_Sample_Rate
961
Pulse_Source_Timing
961
Pulse_Step_Linear
962
Pulse_Sweep_Linear
965
Pulse_Train
968
Rpm_Config
969
Seg_Arb_Sequence
974
Seg_Arb_Waveform
974
Setmode (LLEC)
974
LPT Commands for Pulse Source Only
976
Arb_Array
976
Arb_File
977
Devclr
978
Devint
978
Getstatus
980
Init
982
Pulse_Burst_Count
983
Pulse_Current_Limit
984
Pulse_Dc_Output
985
Pulse_Delay
986
Pulse_Fall
987
Pulse_Halt
988
Pulse_Init
989
Pulse_Load
990
Pulse_Output
991
Pulse_Output_Mode
992
Pulse_Period
993
Pulse_Range
994
Pulse_Rise
995
Pulse_Ssrc
996
Pulse_Trig
997
Pulse_Trig_Output
998
Pulse_Trig_Polarity
999
Pulse_Trig_Source
1000
Pulse_Vhigh
1002
Pulse_Vlow
1004
Pulse_Width
1007
Seg_Arb_Define
1007
LPT Commands for the Cvus
1010
Seg_Arb_File
1010
Adelay
1011
Asweepv
1012
Bsweepx
1013
Cvu_Custom_Cable_Comp
1015
Devclr
1015
Devint
1016
Dsweepf
1017
Dsweepv
1019
Forcev
1020
Getstatus
1021
Measf
1022
Meast
1022
Measv
1023
Measz
1023
Rangei
1024
Rtfary
1025
Setauto
1025
Setfreq
1026
Setlevel
1027
Setmode (4210-CVU)
1027
Smeasf
1029
Smeasfrt
1030
Smeast
1031
Smeastrt
1032
Smeasv
1033
Smeasvrt
1034
Smeasz
1034
Smeaszrt
1036
Sweepf
1037
Sweepv
1038
Programming Examples
1039
LPT Commands for Switching
1043
Addcon
1043
Clrcon
1044
Conpin
1044
Conpth
1045
Cviv_Config
1046
Cviv_Display_Config
1047
Cviv_Display_Power
1048
Delcon
1049
Devint
1050
LPT Library Status and Error Codes
1052
Customized Error Texts
1053
Code Status or Error Titles
1053
Large Number Reported Readings and Explanations
1059
LPT Library and Clarius Interaction When Using Utms
1059
Using Switch Matrices
1060
Typical Test Systems Using a Switch Matrix
1060
Matrix Card Types
1061
Switch Matrix Mainframes
1066
Switch Matrix Connections
1066
Typical SMU Matrix Card Connections
1066
Typical Preamplifier Matrix Card Connections
1068
Typical CVU Matrix Card Connections
1070
Connection Scheme Settings
1071
Row-Column or Instrument Card Settings
1072
Switch Matrix Control
1075
Signal Paths to a DUT
1076
4200A-SCS Signal Paths
1076
C-V Analyzer Signal Paths
1079
Keysight Model 8110A Pulse Generator Signal Path
1082
Use Kcon to Add a Switch Matrix to the System
1083
Step 1. Exit Clarius and Open Kcon
1083
Step 2. Add a Test Fixture or Probe Station
1083
Step 3. Add Switching System Mainframe
1086
Step 4. Set GPIB Address
1087
Step 5. Configure the Instrument Connection Scheme
1087
Step 6. Assign Switch Cards to Mainframe Slots
1087
Step 7. Set Matrix Card Properties
1088
Step 8. Save Configuration
1089
Step 9. Close Kcon and Open Clarius
1089
Switch Matrix Control Example
1089
Set up and Run a Switch Matrix in Clarius
1090
Matrixulib User Library
1091
Connectpins User Module
1091
Using a Model 590 C-V Analyzer
1094
Introduction
1094
C-V Measurement Basics
1094
Capacitance Measurement Tests
1095
Connections
1095
Cable Compensation
1097
Using Kcon to Add 590 C-V Analyzer to System
1098
Model 590 Test Examples
1098
Cable Compensation Example
1099
C-V Sweep Example
1102
Ki590Ulib User Library
1104
Cablecompensate590 User Module
1105
Cmeas590 User Module
1107
Ctsweep590 User Module
1110
Cvpulsesweep590 User Module
1114
Cvsweep590 User Module
1120
Displaycablecompcaps590 User Module
1124
Loadcablecorrectionconstants
1126
Savecablecompcaps590 User Module
1127
Using a Keysight 4284/4980A LCR Meter
1130
Introduction
1130
C-V Measurement Basics
1130
Capacitance Measurement Tests
1131
Signal Connections
1132
GPIB Connections
1134
Using Kcon to Add a Keysight LCR Meter to the System
1134
Model 4284A or 4980A Test Example
1135
C-V Sweep
1135
Hp4284Ulib User Library
1137
Cvsweep4284 User Module
1138
Cmeas4284 User Module
1140
Using a Model 82 C-V System
1142
Capacitance Measurement Tests
1143
Cable Compensation
1146
Connections
1147
Front-Panel Connections
1147
Rear-Panel Connections
1148
Make Power and GPIB Connections
1149
Using Kcon to Add Model 82 C-V System
1149
Model 82 Projects
1150
Cable Compensation Tests
1150
Capacitance Tests
1153
Formulas for Capacitance Tests
1161
Choosing the Right Parameters
1165
Optimal C-V Measurement Parameters
1165
Determining the Optimal Delay Time
1167
Correcting Residual Errors
1169
Ki82Ulib User Library
1170
Abortmodule82
1170
Cablecompensate82 User Module
1171
Ctsweep82 User Module
1174
Displaycablecompcaps82 User Module
1177
Qtsweep82 User Module
1179
Savecablecompcaps82 User Module
1182
Simcvsweep82 User Module
1185
Simultaneous C-V Analysis
1188
Analysis Methods
1188
Basic Device Parameters
1189
Doping Profile
1194
Interface Trap Density
1196
Mobile Ion Charge Concentration
1197
Generation Velocity and Generation Lifetime (Zerbst Plot
1201
Constants, Symbols, and Equations Used for Analysis
1203
Summary of Analysis Equations
1204
References
1206
Bibliography of C-V Measurements
1206
Articles and Papers
1207
Using a Keysight 8110A/8111A Pulse Generator
1210
Introduction
1210
Pulse Generator Tests
1210
Signal Connections
1211
GPIB Connections
1212
Using Kcon to Add a Keysight Pulse Generator to the System
1213
Hp8110Ulib User Library
1213
Pguinit8110 User Module
1214
Pgusetup8110 User Module
1215
Pgutrigger8110 User Module
1217
Set up a Probe Station
1218
Prober Control Overview
1218
Supported Probers
1220
PRBGEN User Modules
1220
Example Test Execution Sequence: Probesites Project
1222
Example Test Execution Sequence: Probesubsites Project
1223
Understanding Site Coordinate Information
1224
Reference Site (die
1224
Probe Sites (die
1225
Chuck Movement
1225
PRBGEN User Library
1227
Prinit
1228
Prchuck
1229
Prssmovnxt
1230
Prmovnxt
1231
Tutorial: Control a Probe Station
1232
Test System Connections
1233
Kcon Setup
1233
Test Flow
1234
Using a Cascade Microtech PA200 Prober
1236
Cascade Microtech PA200 Prober Software
1236
Software Versions
1236
Probe Station Configuration
1237
Set up Communications
1237
Set up Communications on the 4200A-SCS
1239
Set up Communications on the Prober
1241
Set up Wafer Geometry
1245
Create a Site Definition and Define a Probe List
1248
Load, Align, and Contact the Wafer
1249
Aligning the Wafer
1251
Start the Alignment Wizard
1251
Verify Wafer Alignment
1252
Set the Chuck Heights
1253
Clarius Probesubsites Project Example
1255
Set the Wafer Map
1258
Use Kcon to Add a Prober
1260
Running Projects
1261
Clarius
1261
Commands and Error Symbols
1262
Using a Micromanipulator 8860 Prober
1264
Micromanipulator 8860 Prober Software
1264
Software Versions
1265
Probe Station Configuration
1265
Set up Communications
1265
Set up Wafer Geometry
1269
Create a Site Definition and Define a Probe List
1271
Load, Align, and Contact the Wafer
1272
Probesites Clarius Project Example
1280
Set Spline Pattern (Optional
1282
Use Kcon to Add a Prober
1284
Clarius
1285
Probesubsites Clarius Project Example
1286
Use Kcon to Add a Prober
1288
Clarius
1289
Commands and Error Symbols
1291
Using a Manual or Fake Prober
1292
Using a Manual or Fake Prober Software
1292
Manual Prober Overview
1292
Fake Prober Overview
1293
Modifying the Prober Configuration File
1294
Probesites Clarius Project Example
1295
Use Kcon to Add a Prober
1296
Clarius
1297
Probesubsites Clarius Project Example
1298
Use Kcon to Add a Prober
1298
Clarius
1299
Using a Cascade Summit-12000 Prober
1302
Cascade Summit 12000 Prober Software
1302
Software Version
1302
Probe Station Configuration
1302
Set up Communications
1302
Set up Wafer Geometry
1309
Create a Site Definition and Define a Probe List
1314
Load, Align, and Contact the Wafer
1316
Probesites Clarius Project Example
1320
Nucleus UI
1320
Use Kcon to Add a Prober
1320
Clarius
1321
Probesubsites Clarius Project Example
1322
Use Kcon to Add a Prober
1326
Clarius
1327
Commands and Error Symbols
1328
Using a Signatone CM500 Prober
1330
Signatone CM500 Prober Software
1330
Software Versions
1330
Probe Station Configuration
1330
Set up Communications
1330
Modify the Prober Configuration File
1332
Set up Wafer Geometry
1334
Load, Align, and Contact the Wafer
1335
Set up Programmed Sites Without a Subsite
1338
Set up Programmed Sites with a Subsite
1340
Clarius Project Example for Probe Sites
1341
Cm500
1341
Use Kcon to Add a Prober
1341
Clarius Project Example
1342
Probesites Clarius Project Example
1345
Probesubsites Clarius Project Example
1347
Commands and Error Symbols
1348
Wafer-Level Reliability Testing
1350
Introduction
1350
JEDEC Standards
1351
HCI and WLR Projects
1351
Hot Carrier Injection Projects
1352
Negative Bias Temperature Instability Project
1354
Electromigration Project
1356
Charge-To-Breakdown Test of Dielectrics Project
1357
HCI Degradation: Background Information
1358
Configuration Sequence for Subsite Cycling
1358
V-Ramp and J-Ramp Tests
1359
V-Ramp Test: Qbd_Rmpv User Module
1360
J-Ramp Test: Qbd_Rmpj User Module
1365
Index
1370
Other manuals for Keithley 4200A-SCS
User Manual
184 pages
Quick Start Guide
18 pages
4
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Keithley 4200A-SCS Specifications
General
Brand
Keithley
Model
4200A-SCS
Category
Measuring Instruments
Language
English
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