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Keithley 4200A-SCS - Table of Contents

Keithley 4200A-SCS
1381 pages
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Introduction ................................................................................................................. 1-1
Introduction .......................................................................................................................... 1-1
4200A-SCS system overview .............................................................................................. 1-2
Source-Measure Unit (SMU) ..................................................................................................... 1-3
Preamplifier ............................................................................................................................... 1-3
Pulse source-measure hardware .............................................................................................. 1-3
Ground unit (GNDU) ................................................................................................................. 1-3
Capacitance-voltage (CVU) hardware ....................................................................................... 1-3
Software features ...................................................................................................................... 1-4
Embedded computer policy ................................................................................................. 1-4
Connections and configuration ................................................................................. 2-1
Introduction .......................................................................................................................... 2-1
Basic source-measure connections ..................................................................................... 2-1
Maximum signal limits ............................................................................................................... 2-1
Shielding and guarding ............................................................................................................. 2-2
Signal integrity ........................................................................................................................... 2-4
SMU connections ...................................................................................................................... 2-4
Preamplifier connections ........................................................................................................... 2-7
Using the ground unit ................................................................................................................ 2-8
SMU circuit COMMON connections ........................................................................................ 2-12
4200-SMU and 4210-SMU overview ....................................................................................... 2-13
Test equipment connections .............................................................................................. 2-17
Recommended connecting cables .......................................................................................... 2-18
Test fixture and device under test (DUT) connections ............................................................ 2-18
Prober connections ................................................................................................................. 2-20
Configuring safety interlock operation ................................................................................ 2-20
Control and data connections ............................................................................................ 2-22
GPIB connections ................................................................................................................... 2-22
Pulse cards ........................................................................................................................ 2-23
Standard pulse ........................................................................................................................ 2-24
Configuring the system ...................................................................................................... 2-25
Source-measure hardware ......................................................................................... 3-1
Source-measure units .......................................................................................................... 3-1
4200-SMU and 4210-SMU overview ................................................................................... 3-1
Source-measure hardware overview ......................................................................................... 3-2
Basic SMU circuit configuration ................................................................................................. 3-2
Compliance limits ...................................................................................................................... 3-3
Source or sink ........................................................................................................................... 3-4
I-Source operating boundaries .................................................................................................. 3-6
I-Source operation examples .................................................................................................... 3-7
V-Source operating boundaries ................................................................................................. 3-8
V-Source operation examples ................................................................................................... 3-8
Source I measure I and source V measure V.......................................................................... 3-10
SMU terminals and connectors ............................................................................................... 3-10
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