Keithley 4200A-SCS

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Source-measure unit (SMU) with 4200-PA overview ........................................................ 3-11
Basic SMU/preamplifier circuit configuration ........................................................................... 3-12
Compliance limit for a SMU with a 4200-PA ............................................................................ 3-12
Using minimum compliance .................................................................................................... 3-12
Operating boundaries .............................................................................................................. 3-13
Preamplifier terminals and connectors .................................................................................... 3-14
FORCE terminal ...................................................................................................................... 3-14
SENSE terminal ...................................................................................................................... 3-15
Preamplifier CONTROL connector .......................................................................................... 3-15
Preamplifier mounting ............................................................................................................. 3-16
SMU circuit COMMON connections ........................................................................................ 3-18
Ground unit (GNDU) overview ........................................................................................... 3-19
Basic characteristics ............................................................................................................... 3-19
Ground unit connections ......................................................................................................... 3-20
Ground unit DUT connections ................................................................................................. 3-20
Ground unit terminals and connectors .................................................................................... 3-21
FORCE terminal ...................................................................................................................... 3-21
SENSE terminal ...................................................................................................................... 3-21
COMMON terminal .................................................................................................................. 3-22
Chassis ground ....................................................................................................................... 3-22
Source-measure concepts ................................................................................................. 3-23
Guarding ................................................................................................................................. 3-23
Local and remote sensing ....................................................................................................... 3-27
Sink overview .......................................................................................................................... 3-30
Source-measure considerations .............................................................................................. 3-31
Sweep concepts ...................................................................................................................... 3-34
Operation mode timing diagrams ............................................................................................ 3-36
Multi-frequency capacitance-voltage unit ................................................................ 4-1
Introduction .......................................................................................................................... 4-1
Measurement overview ........................................................................................................ 4-1
Measurement functions ............................................................................................................. 4-2
Test signal ................................................................................................................................. 4-3
DC bias function and sweep characteristics .............................................................................. 4-3
Force-measure timing ............................................................................................................... 4-4
4210-CVU connections ........................................................................................................ 4-5
Connection notes ...................................................................................................................... 4-5
Typical 4210-CVU test connections to a DUT ........................................................................... 4-6
Test connections to a probe card .............................................................................................. 4-7
Typical CVU matrix card connections ....................................................................................... 4-7
Connection compensation ................................................................................................. 4-10
Generate open connection compensation data ....................................................................... 4-11
Generate short connection compensation data ....................................................................... 4-13
Generate load connection compensation data ........................................................................ 4-15
Compensation data ................................................................................................................. 4-16
Enable compensation .............................................................................................................. 4-17
ABB unbalance errors ............................................................................................................. 4-18
CVU Real-Time Measure Mode ......................................................................................... 4-18
Confidence Check .............................................................................................................. 4-19
Run an open check and short check ....................................................................................... 4-20
4210-CVU project example ................................................................................................ 4-21
Select a project ....................................................................................................................... 4-21
Configure the test .................................................................................................................... 4-23