Keithley 4200A-SCS - Tutorial: Control a Probe Station

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix F:
Set up a probe station
4200A-901-01 Rev. C / February 2017 F-15
Tutorial: Control a probe station
This tutorial demonstrates how to control a probe station to test five identical sites (or die or reticles)
on a sample wafer.
Each wafer site has two subsites (or test element groups). At each subsite there are two devices (or
test elements) to be tested:
• 4-terminal N-channel MOSFET
• 3-terminal NPN transistor
The subsites do not need to be identical, but for simplicity they are assumed to be the same. This is
illustrated in the following figure.
Figure 629: Sample wafer organization