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Keithley 4200A-SCS Reference Manual

Keithley 4200A-SCS
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Appendix
H: Using a Micromanipulator 8860 Prober Model 4200A-SCS Parameter Analyzer
Reference Manual
H-2 4200A-901-01 Rev. C / February 2017
Software versions
The following list contains the software versions used to verify the configuration of the 8860 prober
with the 4200A-SCS:
Product Name:
pcBridge
Product Version:
2.0.2
Product Name:
pcIndie
Product Version:
2.0.7
Product Name:
pcLaunch
Product Version:
2.0.9
Product Name:
pcNav
Product Version:
2.0.9
Product Name:
pcWafer
Product Version: 2.0.8
Product Name:
pcRouter
Product Version:
2.0.9
Probe station configuration
Ensure that you are familiar with the Micromanipulator 8860 prober and its supporting documentation
before attempting setup, configuration, or operation.
To set up and configure the 8860 prober for use with the 4200A-SCS, you will:
• Set up communications (on page H-2)
• Set up wafer geometry (on page H-6)
• Create a site definition and define a probe list (on page H-8)
• Load, align, and contact the wafer (on page H-9)
Each step is detailed in the following topics.
Set up communications
To set up communications:
1. Turn on power to the 4200A-SCS.
2. Turn on power to the prober.
3. Ensure that the vacuum has been properly connected.
4. On the pcBridge computer, connect the pcBridge computer’s RS232 port (on the rear panel of the
pcBridge computer) to the 4200A-SCS COM1 port. Use a DB25 female to DB9 female cable
(shielded null modem cable). See the figure below for details.

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Keithley 4200A-SCS Specifications

General IconGeneral
BrandKeithley
Model4200A-SCS
CategoryMeasuring Instruments
LanguageEnglish

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