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Appendix

G: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Parameter Analyzer

Reference Manual

G-18 4200A-901-01 Rev. C / February 2017

If the alignment is not correct, repeat the alignment. If the alignment is correct, click Finish.

Figure 656: Aligning the wafer: Point 2

Set the chuck heights

To set the chuck heights:

1. Launch the navigator from the ProberBench NT window icon.

2. In the Chuck Navigator dialog box, use the chuck up and down arrows to make contact with the

wafer on the home die and home subsite.

Figure 657: Chuck navigator dialog box wafer height

Default Chapter4
- Safety Precautions4
- Table of Contents6
Introduction26
- 4200A-SCS System Overview27
- Embedded Computer Policy29
Connections and Configuration30
- Introduction30
- Basic Source-Measure Connections30
- Test Equipment Connections46
- Configuring Safety Interlock Operation49
- Control and Data Connections51
  - GPIB Connections51
- Pulse Cards52
  - Standard Pulse53
- Configuring the System54
Source-Measure Hardware56
- Source-Measure Units56
- 4200-SMU and 4210-SMU Overview56
- Source-Measure Unit (SMU) with 4200-PA Overview66
- Ground Unit (GNDU) Overview74
- Source-Measure Concepts78
Multi-Frequency Capacitance-Voltage Unit94
- Introduction94
- Measurement Overview94
- 4210-CVU Connections98
- Connection Compensation103
- CVU Real-Time Measure Mode111
- Confidence Check112
  - Run an Open Check and Short Check113
- 4210-CVU Project Example114
- Timing Diagrams118
- CVU Terminal Settings Advanced Settings and Circuits124
- C-V Projects126
Pulse Measure and Pulse Generator Units194
- PGU and PMU Connectors195
- PMU Block Diagram196
- Pulse Modes196
- Pulse Measurement Types (PMU)197
- Measure Modes197
- Sample Rate198
- Model 4225-RPM199
  - RPM Input, Output, and Top Panels199
  - Using the RPM as a Switch201
- Waveform Capture202
- Connections202
  - PMU Common Connections203
  - Shield Connections204
  - Cable Length204
  - High Frequency Connections204
  - Prober Chuck Connections205
  - Two-Terminal Device Connections205
  - Three-Terminal Device Connections207
  - Four-Terminal Device Connections208
  - Connections to Prober or Test Fixture Bulkhead Connectors209
  - Using an SMA to SSMC Adapter Cable to Connect Pulse Card to DUT209
  - 4225-RPM Connections210
- Configure the PGU, PMU, and RPM Using Tests213
- PMU Pulse Timing Preview213
  - PMU Amplitude Sweep Example (One-Channel)215
  - PMU Amplitude Sweep and Step Example (Two-Channel)217
  - Higher Channel Count Test Example220
- PMU Connection Compensation223
  - Perform Connection Compensation225
  - Enabling Connection Compensation226
- Load-Line Effect Compensation (LLEC) for the PMU227
  - Methods to Compensate for Load-Line Effect227
  - How LLEC Adjusts Pulse Output to the Target Levels228
  - Coping with the Load-Line Effect229
  - LLEC Maintains Even Voltage Spacing230
  - Test Considerations231
  - LPT Functions Used to Configure LLEC231
  - Enable LLEC232
  - Disable LLEC and Set the Output Impedance233
- Pulse Parameter Definitions233
- PMU Minimum Settling Times Versus Current Measure Range234
- PMU Capacitive Charging/Discharging Effects235
- PMU and RPM Measure Ranges Are Not Source Ranges237
- 4220-PGU and 4225-PMU Output Limitations238
- 4200A-SCS Power Supply Limitations239
- Basic Troubleshooting Procedure241
  - Step 1. Verify Prober Connections from the PMU or RPM to the DUT241
  - Step 2. Verify the Pulse Shape242
  - Step 3. Is the Pulse Level Correct for each Channel243
  - Step 4. Is the Pulse I-V Curve Suspect243
- Pulse Source-Measure Concepts248
  - Ultra-Fast I-V Tests248
  - Segment Arb Waveform249
  - Full Arb Waveform252
  - Pulse Waveforms for Nonvolatile Memory Testing253
  - DUT Resistance Determines Pulse Voltage Across DUT254
  - Triggering259
  - Pulse Source-Measure Connections262
- Measurement Types263
  - Spot Mean Measurements263
  - Spot Mean Discrete Readings263
  - Spot Mean Average Readings264
  - Waveform Measurements265
  - Waveform Discrete Readings266
  - Waveform Average Readings266
  - Measurement Timing267
Clarius270
- Get Started with Clarius270
  - Clarius Interface271
  - Additional Clarius Applications278
- Set up a Simple Project278
- Configure a Simple Test282
  - Set the Key Parameters283
- Run a Simple Test284
- Working with My Projects285
- Test and Terminal Setting Descriptions291
- Set up a Complex Project374
- Configure a Complex Test412
- Run a Complex Test445
- Analyze Data452
- The Formulator491
- Calc Worksheet Function Definitions541
- Tools566
- Customize Clarius566
- User Library Descriptions574
- Demo Project Overview601
- Testing Flash Memory605
- Embedded Computer Policy623
Keithley Configuration Utility (Kcon)624
- Kcon Main Window625
- Configuration Navigator626
- Add an External Instrument627
- Remove an External Instrument632
- Validate Configuration632
- Update Preamplifier, RPM, and CVIV Configurations633
- Save634
- System Configuration Summary634
- System Configuration Properties635
  - KI 4200A SCS Properties635
  - Instrument Properties and Connections637
- KXCI Settings639
- Tools643
- Kcon Learning Center645
Keithley User Library Tool (KULT)646
- Introduction646
- Develop and Use User Libraries658
- Copy User Libraries and Modules from a 4200-SCS658
- Enabling Real-Time Plotting for Utms659
- KULT Tutorials660
- Advanced KULT Features694
- Creating Project Prompts708
  - Using Dialog Boxes708
  - Dialog Box Test Examples710
Keithley External Control Interface (KXCI)712
- Introduction712
- KXCI Communications Connections713
  - GPIB Connections713
  - Ethernet Connections714
- Using Kcon to Configure KXCI714
  - Setting the Remote Control Mode (GPIB or Ethernet)715
- Starting KXCI and the GPIB Command Interpreter716
  - GPIB Status Indicators (GPIB Communications Only)717
  - Graph Display717
- Using KXCI717
- Logging Commands, Errors, and Test Results717
- Graphing the Test Results720
- GPIB Command Set721
- GPIB Command Reference724
- Ethernet Command Reference760
- SMU Default Settings761
- System Mode SMU Default Settings762
- Output Data Formats763
  - Data Format for System Mode Readings763
  - Data Format for User Mode Readings764
- Status Byte and Serial Polling765
- Sample Programs767
- GPIB Error Messages769
- KXCI Pulse Generator Commands770
- KXCI CVU Commands777
- Calling KULT User Libraries Remotely792
Kpulse (for Keithley Pulse Cards)800
- Triggering802
- Standard Pulse Waveforms803
- Segment Arb Waveforms805
  - Exporting Segment Arb Waveform Files807
- Custom File Arb Waveforms (Full Arb)808
System Administration820
- Default User Accounts821
- Create New User Accounts821
- System Directories and Files822
- Manage Projects for Multiple Users822
- Enable Scroll Bars in Acrobat Reader823
- System-Level Backup and Restore Software823
  - Restore the Drive Image to Factory Condition824
  - Choose the Files to be Backed up824
- Protect User Files and System Software825
Maintenance828
- Introduction828
- Front-Panel Display829
  - Cleaning the Front-Panel Display829
  - Adjusting the Display829
- Air Intake Ventilation Screens829
- Solid-State Hard Drive Maintenance830
- Repacking for Shipment830
- Updates to the Operating System Software830
- Firmware Upgrade831
- Accessing the Release Notes831
- Reset the Hardware831
- Lithium Battery831
- Calibrate the System832
- Fan Operation834
- Making Stable Measurements with Smus835
- Low-Current Measurements838
- Interference844
LPT Library Function Reference846
- Lists of LPT Library Commands847
- LPT Commands for General Operations854
- LPT Commands for Math Operations896
- LPT Commands for Pgus and Pmus936
- LPT Commands for Pulse Source Only976
- LPT Commands for the Cvus1010
- LPT Commands for Switching1043
- LPT Library Status and Error Codes1052
- LPT Library and Clarius Interaction When Using Utms1059
Using Switch Matrices1060
- Typical Test Systems Using a Switch Matrix1060
  - Matrix Card Types1061
  - Switch Matrix Mainframes1066
- Switch Matrix Connections1066
- Connection Scheme Settings1071
  - Row-Column or Instrument Card Settings1072
- Switch Matrix Control1075
- Signal Paths to a DUT1076
- Use Kcon to Add a Switch Matrix to the System1083
- Switch Matrix Control Example1089
  - Set up and Run a Switch Matrix in Clarius1090
- Matrixulib User Library1091
  - Connectpins User Module1091
Using a Model 590 C-V Analyzer1094
- Introduction1094
- Using Kcon to Add 590 C-V Analyzer to System1098
- Model 590 Test Examples1098
  - Cable Compensation Example1099
  - C-V Sweep Example1102
- Ki590Ulib User Library1104
Using a Keysight 4284/4980A LCR Meter1130
- Introduction1130
- Using Kcon to Add a Keysight LCR Meter to the System1134
- Model 4284A or 4980A Test Example1135
  - C-V Sweep1135
- Hp4284Ulib User Library1137
  - Cvsweep4284 User Module1138
  - Cmeas4284 User Module1140
Using a Model 82 C-V System1142
- Capacitance Measurement Tests1143
- Cable Compensation1146
- Connections1147
- Using Kcon to Add Model 82 C-V System1149
- Model 82 Projects1150
- Choosing the Right Parameters1165
- Ki82Ulib User Library1170
- Simultaneous C-V Analysis1188
Using a Keysight 8110A/8111A Pulse Generator1210
- Introduction1210
- Using Kcon to Add a Keysight Pulse Generator to the System1213
- Hp8110Ulib User Library1213
Set up a Probe Station1218
- Prober Control Overview1218
- Understanding Site Coordinate Information1224
- PRBGEN User Library1227
- Tutorial: Control a Probe Station1232
Using a Cascade Microtech PA200 Prober1236
- Cascade Microtech PA200 Prober Software1236
  - Software Versions1236
- Probe Station Configuration1237
- Set up Communications1237
  - Set up Communications on the 4200A-SCS1239
  - Set up Communications on the Prober1241
- Set up Wafer Geometry1245
- Create a Site Definition and Define a Probe List1248
- Load, Align, and Contact the Wafer1249
- Clarius Probesubsites Project Example1255
- Commands and Error Symbols1262
Using a Micromanipulator 8860 Prober1264
- Micromanipulator 8860 Prober Software1264
  - Software Versions1265
- Probe Station Configuration1265
- Probesites Clarius Project Example1280
- Probesubsites Clarius Project Example1286
  - Use Kcon to Add a Prober1288
  - Clarius1289
- Commands and Error Symbols1291
Using a Manual or Fake Prober1292
- Using a Manual or Fake Prober Software1292
- Manual Prober Overview1292
- Fake Prober Overview1293
- Modifying the Prober Configuration File1294
- Probesites Clarius Project Example1295
  - Use Kcon to Add a Prober1296
  - Clarius1297
- Probesubsites Clarius Project Example1298
  - Use Kcon to Add a Prober1298
  - Clarius1299
Using a Cascade Summit-12000 Prober1302
- Cascade Summit 12000 Prober Software1302
  - Software Version1302
- Probe Station Configuration1302
- Probesites Clarius Project Example1320
- Probesubsites Clarius Project Example1322
  - Use Kcon to Add a Prober1326
  - Clarius1327
- Commands and Error Symbols1328
Using a Signatone CM500 Prober1330
- Signatone CM500 Prober Software1330
  - Software Versions1330
- Probe Station Configuration1330
- Clarius Project Example for Probe Sites1341
  - Cm5001341
  - Use Kcon to Add a Prober1341
- Clarius Project Example1342
- Probesites Clarius Project Example1345
- Probesubsites Clarius Project Example1347
- Commands and Error Symbols1348
Wafer-Level Reliability Testing1350
- Introduction1350
- JEDEC Standards1351
- HCI and WLR Projects1351
- HCI Degradation: Background Information1358
- Configuration Sequence for Subsite Cycling1358
- V-Ramp and J-Ramp Tests1359
  - V-Ramp Test: Qbd_Rmpv User Module1360
  - J-Ramp Test: Qbd_Rmpj User Module1365
Index1370

Brand	Keithley
Model	4200A-SCS
Category	Measuring Instruments
Language	English

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