D: Using a Model 82 C-V System Model 4200A-SCS Parameter Analyzer
D-44 4200A-901-01 Rev. C / February 2017
SIMCVsweep82 user module
The SIMCVsweep82 routine performs a simultaneous capacitance versus voltage (C-V) sweep using
the Keithley Instruments 82 C-V System.
Usage
status = SIMCVsweep82(double Frequency, double Default_Bias, double Stress_Time,
double VSub_Start, double VSub_Stop, double VSub_Step, int Range595, int
Range590, int Model590, int Filter, double Delay595, int LeakageCorrection, char
*CabCompFile, int OffsetCorrect, char *InstldStr, int InputPin, int OutPin,
double *CHF, int CHF_ArrSize, double *VSub, int VSub_ArrSize, double *CQS, int
CQS_ArrSize, double G_or_R, int G_or_R_ArrSize, double *QT, int QT_ArrSize);
Returned values are placed in the Analyze sheet; see Details
The measurement frequency to use for the 590:
• 100 kHz: 0
•
DC bias applied before and after a voltage sweep (−100 V to +100 V)
Time for which default bias is stressed on the device before voltage sweep: 0 s
to 999 s
Start voltage on substrate: −120 V to +120 V
Stop voltage on substrate: −120 V to +120 V
Voltage step size: ±0 V , ±0.01 V, ±0.02 V, ±0.05 V, or ±0.1 V
The measurement range for the 595 to use:
• 200 pF: 1
• 2 nF: 2
• 20 nF:
The measurement range for the 590 to use:
to
; refer to Details
The measurement model to use for high frequency measurement:
• Parallel mode: 0
•
Enable or disable the digital filter:
• 1 reading: 0
• 3 readings: 1
• 9 readings: 2
• 24 readings:
Delay time for 595; maximum 199 s (default 0.07 s)
Enable or disable the leakage current correction of the 595:
• Disable: 0
• Enable:
The complete name and path for the cable compensation file; see Details
Enable or disable an offset correction measurement:
• Disable offset correction: 0
• Enable offset correction:
CMTR 82 instrument ID; default is CMTR1; can be CMTR1 to CMTR4, depending
on your system configuration
The DUT pin to which the 5951 input terminal is attached (−1 to 72); if a value
of less than 1 is specified, no switch matrix connections are made
The DUT pin to which the 5951 output terminal is attached (−1 to 72); if a value
of less than 1 is specified, no switch matrix connections are made
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