Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix G: Using a Cascade Microtech P
A200 Prober
4200A-901-01 Rev. C / February 2017 G-23
8. From the Options menu, select units (Microns or Mils).
9. Edit the table with the coordinates of the subsites.
10. From the Table menu, select Save or Save As.
An x in the On column defines the subsites that will be probed when using the subsite probing
project (in other words, when using PrSSMovNxt). Other subsites may be defined in the list.
Set the wafer map
On the ProberBench NT computer:
1. Select the ProberBench NT icon on the desktop.
Figure 666: ProberBench NT icon
2. From the ProberBench NT window, select the Wafer Map file.
Figure 667: ProberBench NT window