Keithley 4200A-SCS - Commands and Error Symbols

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix G:
Using a Cascade Microtech PA200 Prober
4200A-901-01 Rev. C / February 2017 G-27
Figure 673: probesubsites project tree
6. Click Run.
Commands and error symbols
The following table contains error and status symbols listed by command.
Available commands and responses
PrChuck PrInit PrMovNxt PrSSMovNxt
PR_OK
X
X
X
X
BAD_CHUCK
X
INVAL_MODE
X
UNINTEL_RESP
X
X
X
X
INVAL_PARAM
X
BAD_MODE
X
X
X
UNEXPE_ERROR
X
X
X
PR_WAFERCOMPLETE
X
X