F: Set up a probe station Model 4200A-SCS Parameter Analyzer
F-10 4200A-901-01 Rev. C / February 2017
Figure 628: Clarius: Example of site coordinates: Analyze Sheet
PRBGEN user library
The PRBGEN user library provides test modules to initialize the prober, move to the next site or subsite
in the wafer map of the prober, make or break contact between the probes and the wafer, and get the
X position and Y position of the prober. It allows Clarius to control all supported probers in the same
manner. Clarius projects that use PRBGEN work with any prober supported by Keithley Instruments.
The user modules in the PRBGEN user library are provided as actions in Clarius.
PRBGEN user modules
User module Clarius action Description
page F-12)
Directs the prober to have the probe pins make contact with the
wafer or separate the pins from the wafer.
PrInit (on page
Initializes the prober with die size, first coordinate (X and Y),
units (mm or mils), and mode information.
page F-14)
In learn mode, the PrMovNxt command causes the prober to
move to the next site after inking.
PrSSMovNxt
(on page F-13)
In learn mode, the PrSSMovNxt command causes the prober to
move to the next subsite after inking.
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