Keithley 4200A-SCS - Probesites Clarius Project Example; Nucleus UI; Use Kcon to Add a Prober

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix J: Using a Cascade Summit-
12000 Prober
4200A-901-01 Rev. C / February 2017 J-19
When the Joystick mode is set to "Scan Z Axis," the joystick will control Z movement. While in this
mode, the prober beeps providing an audible alert. When this alert is heard, care should be
exercised when using the joystick for Z travel adjustments. Avoid damage to the probe needle or the
wafer while changing the Z height.
The Up/Down arrows may be used to set Z contact. When using the arrows, travel is fast (coarse
adjustment) when away from the Z contact position, and slow (fine adjustment) when close to the Z
contact position.
When setting the Z contact, the camera stays focused on the probe needles (not on the wafer).
Probesites Clarius Project example
The following is a step-by-step procedure to configure the Summit 120000 so the probesites
Clarius project executes successfully.
Nucleus UI
Using Nucleus UI on the probe station computer, edit and open a wafer map file as described in Set
up wafer geometry (on page J-8) and Create a site definition and define a probe list (on page J-13).
Use KCon to add a prober
On the 4200A-SCS, use KCon to add the prober to the configuration:
1. Open KCon.
2. At the bottom of the Configuration Navigator, select Add External Instrument. The Add External
Instrument dialog box is displayed.
Figure 775: Add a prober in KCon