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Keithley 4200A-SCS

Keithley 4200A-SCS
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Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix L: Wafer-
level reliability testing
4200A-901-01 Rev. C / February 2017 L-3
Hot Carrier Injection projects
The Hot Carrier Injection (HCI) projects determine HCI on MOSFETs. The hci-1-dut project
determines HCI degradation on a single 4-terminal n-MOSFET. The hci-4-dut project determines
HCI degradation on two 4-terminal n-MOFETs and two 4-terminal p-MOSFETs.
The hci-1-dut project is shown in the following figure.
Figure 828: Project tree showing hci-1-dut project

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