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Keithley 4200A-SCS

Keithley 4200A-SCS
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Appendix
L: Wafer-level reliability testing Model 4200A-SCS Parameter Analyzer
Reference Manual
L-4 4200A-901-01 Rev. C / February 2017
For the hci-1-dut project, the hci subsite is set up for subsite cycling using voltage stressing on
the single n-channel MOSFET device (4terminal-n-fet). After the first pre-stress cycle to perform
characterization tests, subsequent cycles voltage stress the device for a specified time before
repeating the tests. The Stress Properties pane for the hci-1-dut project is shown in the following
figure.
Figure 829: Stress Properties for the hci-1-dut project
The hci-4-dut project is similar to the hci-1-dut project except that it is configured to test four
devices using a switching matrix for connections.
In a parallel connection scheme, up to 20 devices can be stressed by voltage. The figure below
shows an example of 20 parallel-connected devices being stressed by eight gate and drain voltages.
Figure 830: HCI and NBTI tests: 20 parallel-connected devices stressed by voltage

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