Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix K:
Using a Signatone CM500 Prober
4200A-901-01 Rev. C / February 2017 K-19
Figure 827: Run probesubsites
Commands and error symbols
The following list contains error and status symbols listed by command.
Available commands and responses
PrChuck
PrInit
PrMovNxt
PrSSMovNxt
PR_OK
X
X
X
X
BAD_CHUCK
X
INVAL_MODE
X
UNINTEL_RESP
X
X
X
X
BAD_MODE
X
BAD_MODE
X
X
X
UNEXPE_ERROR
X
X
X
PR_WAFERCOMPLETE
X
X