Keithley 4200A-SCS - Set up Wafer Geometry

Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix K:
Using a Signatone CM500 Prober
4200A-901-01 Rev. C / February 2017 K-5
Set up wafer geometry
To set up wafer geometry:
1. Click the Prober Setup icon on the toolbar, shown below.
Figure 794: CM500 Prober Setup icon
2. Select Wafermap Setup tab to set up wafer information, such as wafer size, scan distance, X
step size, and Y step size.
Figure 795: CM500 Prober Setup Sheet
3. Select the Chuck Setup tab to enter Z chuck information, such as Z travel and overdrive
distance.
Figure 796: CM500 Chuck Setup Sheet