D: Using a Model 82 C-V System Model 4200A-SCS Parameter Analyzer
D-60 4200A-901-01 Rev. C / February 2017
Figure 613: Simultaneous TVS plot on a highly contaminated wafer
Calculation of the mobile charge concentration could come from the measured V
GS
, C
q
, and C
h
data.
Alternatively, one can calculate the concentration graphically from the displayed simultaneous C-V
curves.
Generation velocity and generation lifetime (Zerbst plot)
Zerbst analysis requires two types of data: C-V and C-t. Important data taken from the C-V
measurement includes C
OX
, C
MIN
, and doping concentration (N
AVG
and N
BULK
). The results of the C-V
analysis are integrated with data taken during a C-t measurement to compute generation velocity and
generation lifetime of electron-hole pairs. These two parameters are computed from the slope and y-
axis intercept of the graph of G/nI vs. w-w
F
as outlined in the following computation information.
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