D: Using a Model 82 C-V System Model 4200A-SCS Parameter Analyzer
D-64 4200A-901-01 Rev. C / February 2017
Effective charge concentration
Flatband capacitance
Where λ = extrinsic DeBye length =
N
x
= N at 90% W
MAX
, or N
A
, or N
D
when input by the user
Flatband voltage shift
Interface trap capacitance and Interface trap density
Mobile ion charge concentration – TVS method
Mobile ion charge concentration – STVS method
Oxide thickness / gate area
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