-SCS Parameter Analyzer Reference Manual Appendix D: Using a Model 82 C-
4200A-901-01 Rev. C / February 2017 D-67
Interface States / Doping Profiles
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Measurements," J. Electrochem, Soc. Solid State Science, 118, 1 (1971).
MOS Process Characterization
Zaihinger, K.H. and Heiman, F.P., "The C-V Technique as an Analytical Tool", Solid State
Technology, 13:5-6 (1970).
McMillian, L., "MOS C-V Techniques for IC Process Control," Solid State Technology, 15, 47 (1972).
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Mobile Ion Charge Monitoring
Stauffer, L., et al., "Mobile Ion Monitoring by Simultaneous Triangular Voltage Sweep," Solid State
Technology, 38, S3 (1995).
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