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Keithley 4200A-SCS

Keithley 4200A-SCS
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Mod
el 4200A-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
voltage unit
4200A-901-01 Rev. C / February 2017 4-35
The switching matrix then connects the 4210-CVU to the capacitor, as shown in the following figure,
and C-V measurements are made.
Figure 118: Switching matrix signal path for C-V testing
This project is set up for use with a Series 700 with a 7174A matrix card. You must configure the
switching system and the matrix card in KCon (see Add an external instrument (on page 7-4
) in the
KCon section). Make sure sensing is set to Local (2-wire).
You can also use the 7072 matrix card for this project. However, you must use Rows G and H with
the 7072.
cap-iv-cv-matrix project summary
This project tests a capacitor by measuring leakage current (using a 4200-SMU) and capacitance
(using the 4210-CVU). These tests generate graphs for current versus time and capacitance versus
time. The testing sequence is:
1. All switches for the matrix are opened.
2. Switches for the matrix card are closed to connect the SMUs to a capacitor (see A in the next
figure). The SMU sources a fixed bias voltage to charge the capacitor, and measures leakage
current as a function of time.
3. Switches are opened to disconnect the SMUs, and then closed to connect the CVU to the
capacitor (see B in the next figure).
4. The CVU sources a fixed bias voltage to the capacitor and measures capacitance as a function of
time. Average capacitance and standard deviation are calculated and displayed on the C-t graph.

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