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Keithley 4200A-SCS

Keithley 4200A-SCS
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Model 4200A
-SCS Parameter Analyzer Reference Manual Appendix J: Using a Cascade Summit-
12000 Prober
4200A-901-01 Rev. C / February 2017 J-17
10. Click OK.
11. Manually move the wafer to the reference die.
12. Click Yes to set the reference die to the present position. When choosing the reference die:
The wafer should be on the chuck and physically in the correct reference position.
Click the die on the wafer map UI that will be the reference die.
An R appears when a die has been selected as the home die.
Figure 770: Align dialog
13. From the Nucleus UI toolbar, click the Hard Align button to display the Hard Align dialog box.
Figure 771: Hard Align button
Figure 772: Hard Align tab

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