K: Using a Signatone CM500 Prober Model 4200A-SCS Parameter Analyzer
K-8 4200A-901-01 Rev. C / February 2017
3. Click the Home die on the wafermap that needs to be set as Home.
4. Close the Edit Map Function window.
Adjust the Z chuck:
1. If an edge sense card is being used as the contact input for Z Chuck, you must select the Setup
SoftZ Contact option from the Setup menu.
Figure 805: CM500 Prober Setup softz contact command
2. Follow the instructions on the window to adjust the height of platen and to determine the contact
position of the Z Chuck.
Figure 806: CM500 Prober Setup Edgesense Contact Position window
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