Keithley 4200A-SCS - Page 1343

Appendix
K: Using a Signatone CM500 Prober Model 4200A-SCS Parameter Analyzer
Reference Manual
K-14 4200A-901-01 Rev. C / February 2017
Configure the prober project:
1. Select Configure. Make sure prober-init is selected in the project tree.
Figure 821: Set prober-init parameters
2. Set the mode to 6.
3. Set the xdie_size and ydie_size for your wafer.
4. Set units to either 0 for English or 1 for metric.
5. Check the subprobtype. If the CM500 prober is presently not at its first site, set subprobtype to
1; otherwise, set it to 0.
Set up actions:
1. In the project tree, select Subsite.
2. Choose Select.
3. Select the Actions library.
4. Add the Prober Chuck Position (prober-contact) action twice.
5. Select the prober-contact_1 action.
6. Rename the action prober-separate.
7. Select Configure.
8. Set chuckposition to 0. This moves the Z chuck to the down (separate) position.