Keithley 4200A-SCS

Appendix
L: Wafer-level reliability testing Model 4200A-SCS Parameter Analyzer
Reference Manual
L-14 4200A-901-01 Rev. C / February 2017
exit_mode: Select:
• 0: Specifies that oxide failure is determined by a measured current that exceeds the user
specified failure current (fail_current)
• 1: Uses two criteria to determine oxide failure; the first criteria is the specified failure current
(fail_current); the second criteria is a slope of current measurement that is a factor
(exit_slope_mult) times the previous measured value; see JEDEC document JESD35-A and
Addenda (JESD35-1 and JESD35-2)
Because of noise considerations, the calculated failure current criteria is used only when the
measured current is 10 times the user-specified noise current. For measured currents below this
value, the fail_current is used as the exit criteria.
Notes on output variables
test_status:
• 2: No test errors (exit due to measured current > a factor of the previous measurement).
• 1: No test errors (exit due to measured current slope > a factor of the previous slope).
• 0: No test errors (exit due to measured current > fail_current ONLY).
• 1: Failed pre-stress test.
• -2: Cumulative charge limit reached.
• -3: Voltage limit reached.
• -4: Maximum time limit reached.
• -5: Masked Catastrophic Failure.
• -6: Non-Catastrophic Failure.
• -7: Invalid specified t_step, hold_time, or measure_delay.
Invalid Test Result - Result = 1e21.