-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
4200A-901-01 Rev. C / February 2017 4-47
cvu-moscap connections
The next figure shows the basic test configuration for testing a MOS capacitor.
Figure 125: Simplified configuration to test MOS capacitor
4210-CVU connections (on page 4-5) provides details on connections to a semiconductor wafer. Use
only the supplied (red) 100 Ω SMA cables for connections to the 4210-CVU. Be sure that all SMA
cables are the same length.
After making or changing connections, be sure to use the Confidence Check diagnostic tool and do
connection compensation tests. Refer to Confidence Check (on page 4-19) and Connection
compensation (on page 4-10) for details.
cvu-moscap project formulas
Formulas and user-defined constants that are used for the application tests are summarized (in
alphabetical order) in the following.
Formula: AR
Formula name: AR (aR)
Units: None
Description: Intermediate parameter for calculation of corrected capacitance.
Formulator entry:
AR = GP_GB-(GP_GB^2 + (2*PI*F_GB*CP_GB)^2)*RS
Simplified equation:
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