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Appendix

J: Using a Cascade Summit-12000 Prober Model 4200A-SCS Parameter Analyzer

Reference Manual

J-22 4200A-901-01 Rev. C / February 2017

2. Log in.

3. From the Window menu of the Nucleus toolbar, select WaferMap to display the wafer map

window. See the following two figures.

Figure 779: Nucleus toolbar

Figure 780: Wafer Map window

Table of Contents

Default Chapter4
- Safety Precautions4
- Table of Contents6
Introduction26
- 4200A-SCS System Overview27
- Embedded Computer Policy29
Connections and Configuration30
- Introduction30
- Basic Source-Measure Connections30
- Test Equipment Connections46
- Configuring Safety Interlock Operation49
- Control and Data Connections51
  - GPIB Connections51
- Pulse Cards52
  - Standard Pulse53
- Configuring the System54
Source-Measure Hardware56
- Source-Measure Units56
- 4200-SMU and 4210-SMU Overview56
- Source-Measure Unit (SMU) with 4200-PA Overview66
- Ground Unit (GNDU) Overview74
- Source-Measure Concepts78
Multi-Frequency Capacitance-Voltage Unit94
- Introduction94
- Measurement Overview94
- 4210-CVU Connections98
- Connection Compensation103
- CVU Real-Time Measure Mode111
- Confidence Check112
  - Run an Open Check and Short Check113
- 4210-CVU Project Example114
- Timing Diagrams118
- CVU Terminal Settings Advanced Settings and Circuits124
- C-V Projects126
Pulse Measure and Pulse Generator Units194
- PGU and PMU Connectors195
- PMU Block Diagram196
- Pulse Modes196
- Pulse Measurement Types (PMU)197
- Measure Modes197
- Sample Rate198
- Model 4225-RPM199
  - RPM Input, Output, and Top Panels199
  - Using the RPM as a Switch201
- Waveform Capture202
- Connections202
  - PMU Common Connections203
  - Shield Connections204
  - Cable Length204
  - High Frequency Connections204
  - Prober Chuck Connections205
  - Two-Terminal Device Connections205
  - Three-Terminal Device Connections207
  - Four-Terminal Device Connections208
  - Connections to Prober or Test Fixture Bulkhead Connectors209
  - Using an SMA to SSMC Adapter Cable to Connect Pulse Card to DUT209
  - 4225-RPM Connections210
- Configure the PGU, PMU, and RPM Using Tests213
- PMU Pulse Timing Preview213
  - PMU Amplitude Sweep Example (One-Channel)215
  - PMU Amplitude Sweep and Step Example (Two-Channel)217
  - Higher Channel Count Test Example220
- PMU Connection Compensation223
  - Perform Connection Compensation225
  - Enabling Connection Compensation226
- Load-Line Effect Compensation (LLEC) for the PMU227
  - Methods to Compensate for Load-Line Effect227
  - How LLEC Adjusts Pulse Output to the Target Levels228
  - Coping with the Load-Line Effect229
  - LLEC Maintains Even Voltage Spacing230
  - Test Considerations231
  - LPT Functions Used to Configure LLEC231
  - Enable LLEC232
  - Disable LLEC and Set the Output Impedance233
- Pulse Parameter Definitions233
- PMU Minimum Settling Times Versus Current Measure Range234
- PMU Capacitive Charging/Discharging Effects235
- PMU and RPM Measure Ranges Are Not Source Ranges237
- 4220-PGU and 4225-PMU Output Limitations238
- 4200A-SCS Power Supply Limitations239
- Basic Troubleshooting Procedure241
  - Step 1. Verify Prober Connections from the PMU or RPM to the DUT241
  - Step 2. Verify the Pulse Shape242
  - Step 3. Is the Pulse Level Correct for each Channel243
  - Step 4. Is the Pulse I-V Curve Suspect243
- Pulse Source-Measure Concepts248
  - Ultra-Fast I-V Tests248
  - Segment Arb Waveform249
  - Full Arb Waveform252
  - Pulse Waveforms for Nonvolatile Memory Testing253
  - DUT Resistance Determines Pulse Voltage Across DUT254
  - Triggering259
  - Pulse Source-Measure Connections262
- Measurement Types263
  - Spot Mean Measurements263
  - Spot Mean Discrete Readings263
  - Spot Mean Average Readings264
  - Waveform Measurements265
  - Waveform Discrete Readings266
  - Waveform Average Readings266
  - Measurement Timing267
Clarius270
- Get Started with Clarius270
  - Clarius Interface271
  - Additional Clarius Applications278
- Set up a Simple Project278
- Configure a Simple Test282
  - Set the Key Parameters283
- Run a Simple Test284
- Working with My Projects285
- Test and Terminal Setting Descriptions291
- Set up a Complex Project374
- Configure a Complex Test412
- Run a Complex Test445
- Analyze Data452
- The Formulator491
- Calc Worksheet Function Definitions541
- Tools566
- Customize Clarius566
- User Library Descriptions574
- Demo Project Overview601
- Testing Flash Memory605
- Embedded Computer Policy623
Keithley Configuration Utility (Kcon)624
- Kcon Main Window625
- Configuration Navigator626
- Add an External Instrument627
- Remove an External Instrument632
- Validate Configuration632
- Update Preamplifier, RPM, and CVIV Configurations633
- Save634
- System Configuration Summary634
- System Configuration Properties635
  - KI 4200A SCS Properties635
  - Instrument Properties and Connections637
- KXCI Settings639
- Tools643
- Kcon Learning Center645
Keithley User Library Tool (KULT)646
- Introduction646
- Develop and Use User Libraries658
- Copy User Libraries and Modules from a 4200-SCS658
- Enabling Real-Time Plotting for Utms659
- KULT Tutorials660
- Advanced KULT Features694
- Creating Project Prompts708
  - Using Dialog Boxes708
  - Dialog Box Test Examples710
Keithley External Control Interface (KXCI)712
- Introduction712
- KXCI Communications Connections713
  - GPIB Connections713
  - Ethernet Connections714
- Using Kcon to Configure KXCI714
  - Setting the Remote Control Mode (GPIB or Ethernet)715
- Starting KXCI and the GPIB Command Interpreter716
  - GPIB Status Indicators (GPIB Communications Only)717
  - Graph Display717
- Using KXCI717
- Logging Commands, Errors, and Test Results717
- Graphing the Test Results720
- GPIB Command Set721
- GPIB Command Reference724
- Ethernet Command Reference760
- SMU Default Settings761
- System Mode SMU Default Settings762
- Output Data Formats763
  - Data Format for System Mode Readings763
  - Data Format for User Mode Readings764
- Status Byte and Serial Polling765
- Sample Programs767
- GPIB Error Messages769
- KXCI Pulse Generator Commands770
- KXCI CVU Commands777
- Calling KULT User Libraries Remotely792
Kpulse (for Keithley Pulse Cards)800
- Triggering802
- Standard Pulse Waveforms803
- Segment Arb Waveforms805
  - Exporting Segment Arb Waveform Files807
- Custom File Arb Waveforms (Full Arb)808
System Administration820
- Default User Accounts821
- Create New User Accounts821
- System Directories and Files822
- Manage Projects for Multiple Users822
- Enable Scroll Bars in Acrobat Reader823
- System-Level Backup and Restore Software823
  - Restore the Drive Image to Factory Condition824
  - Choose the Files to be Backed up824
- Protect User Files and System Software825
Maintenance828
- Introduction828
- Front-Panel Display829
  - Cleaning the Front-Panel Display829
  - Adjusting the Display829
- Air Intake Ventilation Screens829
- Solid-State Hard Drive Maintenance830
- Repacking for Shipment830
- Updates to the Operating System Software830
- Firmware Upgrade831
- Accessing the Release Notes831
- Reset the Hardware831
- Lithium Battery831
- Calibrate the System832
- Fan Operation834
- Making Stable Measurements with Smus835
- Low-Current Measurements838
- Interference844
LPT Library Function Reference846
- Lists of LPT Library Commands847
- LPT Commands for General Operations854
- LPT Commands for Math Operations896
- LPT Commands for Pgus and Pmus936
- LPT Commands for Pulse Source Only976
- LPT Commands for the Cvus1010
- LPT Commands for Switching1043
- LPT Library Status and Error Codes1052
- LPT Library and Clarius Interaction When Using Utms1059
Using Switch Matrices1060
- Typical Test Systems Using a Switch Matrix1060
  - Matrix Card Types1061
  - Switch Matrix Mainframes1066
- Switch Matrix Connections1066
- Connection Scheme Settings1071
  - Row-Column or Instrument Card Settings1072
- Switch Matrix Control1075
- Signal Paths to a DUT1076
- Use Kcon to Add a Switch Matrix to the System1083
- Switch Matrix Control Example1089
  - Set up and Run a Switch Matrix in Clarius1090
- Matrixulib User Library1091
  - Connectpins User Module1091
Using a Model 590 C-V Analyzer1094
- Introduction1094
- Using Kcon to Add 590 C-V Analyzer to System1098
- Model 590 Test Examples1098
  - Cable Compensation Example1099
  - C-V Sweep Example1102
- Ki590Ulib User Library1104
Using a Keysight 4284/4980A LCR Meter1130
- Introduction1130
- Using Kcon to Add a Keysight LCR Meter to the System1134
- Model 4284A or 4980A Test Example1135
  - C-V Sweep1135
- Hp4284Ulib User Library1137
  - Cvsweep4284 User Module1138
  - Cmeas4284 User Module1140
Using a Model 82 C-V System1142
- Capacitance Measurement Tests1143
- Cable Compensation1146
- Connections1147
- Using Kcon to Add Model 82 C-V System1149
- Model 82 Projects1150
- Choosing the Right Parameters1165
- Ki82Ulib User Library1170
- Simultaneous C-V Analysis1188
Using a Keysight 8110A/8111A Pulse Generator1210
- Introduction1210
- Using Kcon to Add a Keysight Pulse Generator to the System1213
- Hp8110Ulib User Library1213
Set up a Probe Station1218
- Prober Control Overview1218
- Understanding Site Coordinate Information1224
- PRBGEN User Library1227
- Tutorial: Control a Probe Station1232
Using a Cascade Microtech PA200 Prober1236
- Cascade Microtech PA200 Prober Software1236
  - Software Versions1236
- Probe Station Configuration1237
- Set up Communications1237
  - Set up Communications on the 4200A-SCS1239
  - Set up Communications on the Prober1241
- Set up Wafer Geometry1245
- Create a Site Definition and Define a Probe List1248
- Load, Align, and Contact the Wafer1249
- Clarius Probesubsites Project Example1255
- Commands and Error Symbols1262
Using a Micromanipulator 8860 Prober1264
- Micromanipulator 8860 Prober Software1264
  - Software Versions1265
- Probe Station Configuration1265
- Probesites Clarius Project Example1280
- Probesubsites Clarius Project Example1286
  - Use Kcon to Add a Prober1288
  - Clarius1289
- Commands and Error Symbols1291
Using a Manual or Fake Prober1292
- Using a Manual or Fake Prober Software1292
- Manual Prober Overview1292
- Fake Prober Overview1293
- Modifying the Prober Configuration File1294
- Probesites Clarius Project Example1295
  - Use Kcon to Add a Prober1296
  - Clarius1297
- Probesubsites Clarius Project Example1298
  - Use Kcon to Add a Prober1298
  - Clarius1299
Using a Cascade Summit-12000 Prober1302
- Cascade Summit 12000 Prober Software1302
  - Software Version1302
- Probe Station Configuration1302
- Probesites Clarius Project Example1320
- Probesubsites Clarius Project Example1322
  - Use Kcon to Add a Prober1326
  - Clarius1327
- Commands and Error Symbols1328
Using a Signatone CM500 Prober1330
- Signatone CM500 Prober Software1330
  - Software Versions1330
- Probe Station Configuration1330
- Clarius Project Example for Probe Sites1341
  - Cm5001341
  - Use Kcon to Add a Prober1341
- Clarius Project Example1342
- Probesites Clarius Project Example1345
- Probesubsites Clarius Project Example1347
- Commands and Error Symbols1348
Wafer-Level Reliability Testing1350
- Introduction1350
- JEDEC Standards1351
- HCI and WLR Projects1351
- HCI Degradation: Background Information1358
- Configuration Sequence for Subsite Cycling1358
- V-Ramp and J-Ramp Tests1359
  - V-Ramp Test: Qbd_Rmpv User Module1360
  - J-Ramp Test: Qbd_Rmpj User Module1365
Index1370

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