Keithley 4200A-SCS - Set Up the Measurements in Clarius

Model 4200A
-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
voltage unit
4200A-901-01 Rev. C / February 2017 4-51
Formula: NDOPING
Formula name: NDOPING (N)
Units: 1/cm
3
Description: Doping density.
Formulator entry:
NDOPING = ABS((-2)/(AREA^2*Q*ES)/(DELTA(INVCSQR)/DELTA(DCV_GB)))
Simplified equation:
Formula: NSLOPE
Formula name: NSLOPE
Units: None
Description: Finds slope of 1/C
2
curve.
Formulator entry:
NSLOPE = LINFITSLP(DCV_GB, INVCSQR, VFBPOS, MAXINVSQR)
Formula: NSUB
Formula name: NSUB
Units: 1/cm
3
Description: Calculated substrate doping concentration.
Formulator entry:
NSUB = 2/(NSLOPE*Q*ES*AREA^2)
Formula: PHIB
Formula name: PHIB (ϕ
B
)
Units: V
Description: Bulk potential.
Formulator entry:
PHIB = (-1)*K*TEMP/Q*LN(ABS(N90W)/NI)*DOPETYPE
Simplified equation: