Keithley 4200A-SCS - Page 145

Section
4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer
Reference Manual
4-52 4200A-901-01 Rev. C / February 2017
Formula: QEFF
Formula name: QEFF (Q
EFF
)
Units: C/cm
2
Description: Effective oxide charge.
Formulator entry:
QEFF = COX*(WMS-VFB)/AREA
Simplified equation:
Formula: RS
Formula name: RS (R
S
)
Units: Ω
Description: Series resistance calculated from capacitance.
Formulator entry:
RS = (AT(MAVG(GP_GB, 5)/((2*PI*F_GB)*MAVG(CP_GB, 5)), MAXPOS(MAVG(CP_GB,5))))^2
((1+(AT (MAVG(GP_GB, 5)/((2*PI*F_GB)*MAVG(CP_GB, 5)),MAXPOS(MAVG(CP_GB,5))))^2)
*(AT(MAVG (GP_GB, 5),MAXPOS(MAVG(CP_GB, 5)))))
Simplified equation:
Formula: TOXNM
Formula name: TOXNM (T
OX
)
Units: nm
Description: Calculated thickness of oxide (in nanometers).
Formulator entry: TOXNM = (1E7*AREA*EOX)/COX
Simplified equation: