-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
4200A-901-01 Rev. C / February 2017 4-83
Formula: DEBYEM
Formula name: DEBYEM (λ)
Units: m
Description: Debye length (in meters).
Formulator entry:
DEBYEM = SQRT(ES*K*TEMP/(ABS(N90W)*Q^2))*1E-2
Simplified equation:
Formula: DEPTHM
Formula name: DEPTHM (W)
Units: m
Description: Depletion depth (in meters).
Formulator entry:
DEPTHM = 1E-2*AREA*ES*(1/COND(POX,MINPOS(CADJ),SUBARRAY(CADJ, POX,
MINPOS(CADJ)),SUBARRAY(CADJ, MINPOS(CADJ),POX))-1/COX_CALC))
Simplified equation:
Where:
• W = depletion depth (m)
• A = gate area (cm
2
)
• εs = permittivity of the substrate material (F/cm)
• C = measured capacitance (F)
• C
OX
= oxide capacitance (F)
• 1 x E
-2
= units conversion from cm to m
Formula: INVCSQR
Formula name: INVCSQR
Units: 1/F
2
Description: Inverse square of capacitance.
Formulator entry:
INVCSQR = 1/CADJ^2
Simplified equation:
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