Keithley 4200A-SCS - Page 177

Section
4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer
Reference Manual
4-84 4200A-901-01 Rev. C / February 2017
Formula: N90W
Formula name: N90W
Units: None
Description: Doping density at 90% of maximum depletion depth
Formulator entry:
N90W = AT(NDOPING, FINDD(DEPTHM,0.9*MAX(DEPTHM),2))
Formula: NDOPING
Formula name: NDOPING (N)
Units: 1/cm
3
Description: Doping density.
Formulator entry:
NDOPING = ABS((-2)/(AREA^2*Q*ES)/(DELTA(COND(POX,MAXPOS(INVCSQR),
SUBARRAY(INVCSQR, POX, MINPOS(CADJ)),SUBARRAY(INVCSQR,
MINPOS(CADJ),POX)))/DELTA(DCV_GB)))
Simplified equation:
Formula: PHIB
Formula name: PHIB (ϕ
B
)
Units: V
Description: Bulk potential.
Formulator entry:
PHIB = (-1)*K*TEMP/Q*LN(ABS(N90W)/NI)*DOPETYPE
Simplified equation:
Formula: RS
Formula name: RS (RS)
Units: Ω
Description: Series resistance calculated from capacitance.
Formulator entry:
RS = (AT(GP_GB/((2*PI*F_GB)*CP_GB),POX))^2/((1+(AT(GP_GB/ ((2*PI*F_GB)*
CP_GB),POX))^2)*(AT(GP_GB,POX)))
Simplified equation: