Keithley 4200A-SCS

Section
4: Multi-frequency capacitance-voltage unit Model 4200A-SCS Parameter Analyzer
Reference Manual
4-92 4200A-901-01 Rev. C / February 2017
diode c-2vsv test
This test displays the data as a 1/C
2
versus V curve. You can derive the doping density (N) from the
slope of this curve because N is linearly related to the capacitance.
You can derive the built-in potential (ϕ
B
) of the diode from the intersection of the 1/C
2
curve and the
horizontal axis. Use the graph option Linear Line Fit to derive both the doping density (N) and the
built-in voltage on the x-axis.
c-2vsv-diode test Analyze sheet
The test data is displayed in the Analyze sheet:
• Cp_AC: Measured parallel capacitance.
• Gp_AC: Measured conductance.
• DCV_AC: Forced DC bias voltage.
• F_AC: Forced test frequency.
• Formulas: Formulator calculation results.
AC = Anode to cathode.
diode-dopingprofile test
This test performs a C-V sweep and uses the measurements for doping profiling. At each voltage
step, the doping density and corresponding depth (W) are calculated and plotted on the graph.
diode-dopingprofile Analyze sheet
The test data is displayed in the Analyze sheet:
• Cp_AC: Measured parallel capacitance.
• Gp_AC: Measured conductance.
• DCV_AC: Forced DC bias voltage.
• F_AC: Forced test frequency.
• Formulas: Formulator calculation results.
AC = Anode to cathode.