Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
Signal connections .................................................................................................................... C-3
GPIB connections ..................................................................................................................... C-5
Using KCon to add a Keysight LCR Meter to the system .................................................... C-5
Model 4284A or 4980A test example ................................................................................... C-6
C-V sweep................................................................................................................................. C-6
HP4284ulib user library ........................................................................................................ C-8
CvSweep4284 User Module ...................................................................................................... C-9
Cmeas4284 User Module ....................................................................................................... C-11
Using a Model 82 C-V System ....................................................................................D-1
Introduction .......................................................................................................................... D-1
Capacitance measurement tests ............................................................................................... D-2
Cable compensation ................................................................................................................. D-5
Connections ......................................................................................................................... D-6
Front-panel connections ............................................................................................................ D-6
Rear-panel connections ............................................................................................................ D-7
Make power and GPIB connections .......................................................................................... D-8
Using KCon to add Model 82 C-V System ........................................................................... D-8
Model 82 projects ................................................................................................................. D-9
Cable compensation tests ......................................................................................................... D-9
Capacitance tests .................................................................................................................... D-12
Formulas for capacitance tests ............................................................................................... D-20
Choosing the right parameters ........................................................................................... D-24
Optimal C-V measurement parameters ................................................................................... D-24
Determining the optimal delay time ......................................................................................... D-26
Correcting residual errors ........................................................................................................ D-28
ki82ulib user library ............................................................................................................ D-29
Abortmodule82 ........................................................................................................................ D-29
CableCompensate82 user module .......................................................................................... D-30
CtSweep82 user module ......................................................................................................... D-33
DisplayCableCompCaps82 user module ................................................................................ D-36
QTsweep82 user module ........................................................................................................ D-38
SaveCableCompCaps82 user module .................................................................................... D-41
SIMCVsweep82 user module .................................................................................................. D-44
Simultaneous C-V analysis ................................................................................................ D-47
Analysis methods .................................................................................................................... D-47
Basic device parameters ......................................................................................................... D-48
Doping profile .......................................................................................................................... D-53
Interface trap density ............................................................................................................... D-55
Mobile ion charge concentration ............................................................................................. D-56
Generation velocity and generation lifetime (Zerbst plot) ........................................................ D-60
Constants, symbols, and equations used for analysis ............................................................. D-62
Summary of analysis equations .............................................................................................. D-63
References .............................................................................................................................. D-65
Bibliography of C-V Measurements ......................................................................................... D-65
Articles and Papers ................................................................................................................. D-66
Using a Keysight 8110A/8111A Pulse Generator ..................................................... E-1
Introduction .......................................................................................................................... E-1
Pulse generator tests ................................................................................................................ E-1
Signal connections .................................................................................................................... E-2
GPIB connections ..................................................................................................................... E-3