Keithley 4200A-SCS

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Using KCon to add a Keysight pulse generator to the system ............................................ E-4
HP8110ulib user library ........................................................................................................ E-4
PguInit8110 user module .......................................................................................................... E-5
PguSetup8110 user module ...................................................................................................... E-6
PguTrigger8110 user module .................................................................................................... E-8
Set up a probe station ................................................................................................ F-1
Prober control overview ....................................................................................................... F-1
Supported probers .................................................................................................................... F-3
PRBGEN user modules ............................................................................................................ F-3
Example test execution sequence: probesites project .............................................................. F-5
Example test execution sequence: probesubsites project ......................................................... F-6
Understanding site coordinate information .......................................................................... F-7
Reference site (die) ................................................................................................................... F-7
Probe sites (die) ........................................................................................................................ F-8
Chuck movement ...................................................................................................................... F-8
PRBGEN user library ......................................................................................................... F-10
PrInit ........................................................................................................................................ F-11
PrChuck .................................................................................................................................. F-12
PrSSMovNxt ............................................................................................................................ F-13
PrMovNxt ................................................................................................................................ F-14
Tutorial: Control a probe station ......................................................................................... F-15
Test system connections ......................................................................................................... F-16
KCon setup ............................................................................................................................. F-16
Test flow .................................................................................................................................. F-17
Using a Cascade Microtech PA200 Prober .............................................................. G-1
Cascade Microtech PA200 prober software ........................................................................G-1
Software versions ..................................................................................................................... G-1
Probe station configuration ..................................................................................................G-2
Set up communications ........................................................................................................G-2
Set up communications on the 4200A-SCS ............................................................................. G-4
Set up communications on the prober ...................................................................................... G-6
Set up wafer geometry ...................................................................................................... G-10
Create a site definition and define a probe list .................................................................. G-13
Load, align, and contact the wafer .................................................................................... G-14
Aligning the wafer ................................................................................................................... G-16
Start the Alignment Wizard..................................................................................................... G-16
Verify wafer alignment ............................................................................................................ G-17
Set the chuck heights ............................................................................................................. G-18
Clarius probesubsites project example ............................................................................. G-20
Set the wafer map .................................................................................................................. G-23
Use KCon to add a prober...................................................................................................... G-25
Running projects .................................................................................................................... G-26
Clarius .................................................................................................................................... G-26
Commands and error symbols .......................................................................................... G-27