Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
Using a Micromanipulator 8860 Prober ....................................................................H-1
Micromanipulator 8860 prober software .............................................................................. H-1
Software versions ...................................................................................................................... H-2
Probe station configuration .................................................................................................. H-2
Set up communications ............................................................................................................. H-2
Set up wafer geometry .............................................................................................................. H-6
Create a site definition and define a probe list .......................................................................... H-8
Load, align, and contact the wafer ............................................................................................ H-9
Probesites Clarius project example ................................................................................... H-17
Set spline pattern (optional) .................................................................................................... H-19
Use KCon to add a prober....................................................................................................... H-21
Clarius ..................................................................................................................................... H-22
Probesubsites Clarius project example .............................................................................. H-23
Use KCon to add a prober....................................................................................................... H-25
Clarius ..................................................................................................................................... H-26
Commands and error symbols ........................................................................................... H-27
Using a manual or fake prober ................................................................................... I-1
Using a manual or fake prober software ............................................................................... I-1
Manual prober overview ........................................................................................................ I-1
Fake prober overview ............................................................................................................ I-2
Modifying the prober configuration file .................................................................................. I-3
Probesites Clarius project example ...................................................................................... I-4
Use KCon to add a prober.......................................................................................................... I-5
Clarius ........................................................................................................................................ I-6
Probesubsites Clarius project example ................................................................................. I-7
Use KCon to add a prober.......................................................................................................... I-7
Clarius ........................................................................................................................................ I-8
Using a Cascade Summit-12000 Prober ................................................................... J-1
Cascade Summit 12000 prober software..............................................................................J-1
Software version ....................................................................................................................... J-1
Probe station configuration ...................................................................................................J-1
Set up communications ............................................................................................................. J-1
Set up wafer geometry .............................................................................................................. J-8
Create a site definition and define a probe list ........................................................................ J-13
Load, align, and contact the wafer .......................................................................................... J-15
Probesites Clarius Project example ....................................................................................J-19
Nucleus UI............................................................................................................................... J-19
Use KCon to add a prober....................................................................................................... J-19
Clarius ..................................................................................................................................... J-20
Probesubsites Clarius Project example ..............................................................................J-21
Use KCon to add a prober....................................................................................................... J-25
Clarius ..................................................................................................................................... J-26
Commands and error symbols ............................................................................................J-27