Keithley 4200A-SCS

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Using a Signatone CM500 Prober .............................................................................K-1
Signatone CM500 prober software ...................................................................................... K-1
Software versions ...................................................................................................................... K-1
Probe station configuration .................................................................................................. K-1
Set up communications ............................................................................................................. K-2
Modify the prober configuration file ........................................................................................... K-3
Set up wafer geometry .............................................................................................................. K-5
Load, align, and contact the wafer ............................................................................................ K-6
Set up programmed sites without a subsite .............................................................................. K-9
Set up programmed sites with a subsite ................................................................................. K-11
Clarius project example for probe sites .............................................................................. K-12
CM500 .................................................................................................................................... K-12
Use KCon to add a prober....................................................................................................... K-12
Clarius project example...................................................................................................... K-13
Probesites Clarius project example ................................................................................... K-16
Probesubsites Clarius project example .............................................................................. K-18
Commands and error symbols .......................................................................................... K-19
Waf
er-level reliability testing ..................................................................................... L-1
Introduction .......................................................................................................................... L-1
JEDEC standards ................................................................................................................. L-2
HCI and WLR projects ......................................................................................................... L-2
Hot Carrier Injection projects ..................................................................................................... L-3
Negative Bias Temperature Instability project ........................................................................... L-5
Electromigration project ............................................................................................................ L-7
Charge-to-Breakdown Test of Dielectrics project ...................................................................... L-8
HCI degradation: Background information ........................................................................... L-9
Configuration sequence for subsite cycling ......................................................................... L-9
V-ramp and J-ramp tests .................................................................................................... L-10
V-ramp test: qbd_rmpv User Module ...................................................................................... L-11
J-ramp test: qbd_rmpj User Module ........................................................................................ L-16
Index...................................................................................................................... Index-1