Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
voltage unit
4200A-901-01 Rev. C / February 2017 4-79
cv-vfb3 test
This test performs a C-V sweep on the sample after it has been heated and then cooled. The oxide
capacitance and the flatband voltage (V
fb
) are sent to the Analyze sheet for the subsite. View the Calc
tab in the Analyze sheet to review the values that are used in the mobile ion calculation.
To open the Calc sheet for the subsite:
1. In the project tree, select mobileion.
2. Select Analyze.
3. Select the Calc tab.
Figure 132: Calc sheet for the subsite level (MobileIon)
cv-vfb3 Analyze sheet
The test data is displayed in the Analyze sheet:
• Time: Timestamp for each measurement (if Report Timestamps is selected).
• Cp_GB: Measured parallel capacitance.
• Gp_GB: Measured conductance.
• DCV_GB: Forced DC bias voltage.
• F_GB: Forced test frequency.
• Formulas: Formulator calculation results.
If rows are highlighted in blue, a fault occurred. For details, see Measurement status (on page 6-191
).
GB = gate-to-bulk.