Keithley 4200A-SCS

Model 4200A
-SCS Parameter Analyzer Reference Manual Section 4: Multi-frequency capacitance-
voltage unit
4200A-901-01 Rev. C / February 2017 4-77
Formulator formulas and constants
Formulas are not used for this test.
bias-pos Analyze sheet
The test data is displayed in the Analyze sheet:
• Time: Timestamp for each measurement.
• Cp_GB: Measured parallel capacitance.
• Gp_GB: Measured conductance.
• DCV_GB: Forced DC bias voltage.
• F_GB: Forced test frequency.
• CVU1S: Status code for each measurement. Rows highlighted in blue indicate a fault. For details,
see Measurement status (on page 6-191
).
GB = gate-to-bulk.
hotchuck action
This action prompts you to turn on the hot chuck to a specified temperature and then to cool down the
sample. After the temperature stress, select OK to generate the C-V sweep in the following test. The
bias voltage is output until you select OK.
cv-vfb2 test
This test performs a C-V sweep on the sample after it has been heated and then cooled. The oxide
capacitance and the flatband voltage (V
fb
) are sent to the Analyze sheet for the subsite. Select the
Calc tab of the Analyze sheet to review the values that are used in the mobile ion calculation.
cv-vfb2 Analyze sheet
The test data is displayed in the Analyze sheet:
• Time: Timestamp for each measurement (if Report Timestamps is selected).
• Cp_GB: Measured parallel capacitance.
• Gp_GB: Measured conductance.
• DCV_GB: Forced DC bias voltage.
• F_GB: Forced test frequency.
• Formulas: Formulator calculation results.
If rows are highlighted in blue, a fault occurred. For details, see Measurement status (on page 6-191
).
GB = gate-to-bulk.