Toshiba e-STUDIO4500c - Important SP Codes Related to Process Control

August 2006 PROCESS CONTROL
6-81
Detailed
Descriptions
Important SP Codes Related to Process Control
This table lists the SP codes that are associated with the most important elements
of process control. For more, please refer to Section "5. Service Tables".
SP3501 001
Potential Control
Type Selection
Initial Range
Target Effect in
Process Control
0: Auto
1: Fixed
Charge
Charge dc bias Cdc
SP3576
SP2201
–700 V –450 to –950 V
Potential control
Charge ac bias Vpp
SP3577
SP2202
2.2 kV 1.8 to 2.4 kV,
2.2 kHz
Prevention of
abnormal images
Exposure
PM (LD power) Ldp
SP3581
SP2211
0 –117 to +127 Potential control
Development
Development bias
Vb
SP3575
SP2212
–500 V –300 to –800 V
Potential control