KLA Tencor P-16+ - Page 110

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-62 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Kurtosis (S
ku
) A measure of the peakedness or sharpness of the surface
height distribution. It characterizes the spread of the height
distribution.
RMS Slope (S
delta q
) The root-mean-square value of the surface slope within the
sampling area. RMS slope is sensitive to sampling rate.
Ten Point Height (S
z
) The average value of the absolute heights of the five highest
peaks and the depths of the five deepest pits or valleys within
the sampling area.
Density of Summit
(S
ds
)
The number of summits of a unit sampling area.
Interfacial Area Ratio
(S
dr
)
The ratio of the increment of the interfacial area of a surface
over the sampling area. The Interfacial Area Ratio reflects the
hybrid property of surface.
Table 3.26 3D Roughness Parameters (Continued)
Parameter Description